An instrument for simultaneous linear and angular displacement measurements with nano precision

本应用中要求的SiOS微型双面镜干涉仪是一种可以同时进行纳米(0.000001 mm)范围内精度的成对长度测量的仪器。该仪器将支持目前在萨斯喀彻温大学工程学院和生物医学工程系以及加拿大光源开展的五个项目。在这些项目中，我们的研究目标是开发新的执行器、系统和/或方法/技术，包括远程和超精密定位执行器、电液执行系统、基于分析仪的成像超精密定位系统、纳米工程表面涂层的先进技术，以及用于中风后患者的网络化机器人康复系统。研究成果将对科学、技术、加拿大工业和加拿大卫生服务体系产生重大影响。该设备还将通过研究支持学生在机械工程、生物医学工程和纳米工程领域的培训。

The SIOS Miniature Double Plane Mirror Interferometer requested in this application is an instrument that can simultaneously make pairs of length measurements with precision in the nanometer (0.000001 mm) range. This instrument will support five projects currently being conducted in the College of Engineering and the Division of Biomedical Engineering at the University of Saskatchewan, and the Canadian Light Source. In these projects, our research objectives are to develop novel actuators, systems, and/or methods/technologies, including long-range and ultra-precision positioning actuators, electro-hydraulic actuation systems, ultra-precision positioning systems for analyzer-based imaging, advanced technologies for nanoengineered surface coating, and networked robotic rehabilitation systems for people post-stroke. The research outcomes will have significant impact on science, technology, Canadian industry, and Canadian health delivery system. This equipment will also support the training of students, through research, in the areas of mechanical engineering, biomedical engineering, and nanoengineering.