A mask aligner system

这项研究工具和仪器(RTI)赠款提案的目的是购买掩模对准系统，用于微电子机械系统(MEMS)、毫米波、太赫兹和光电子领域的光刻应用。掩模对准器是任何微制造设施中的关键加工工具。它将位于滑铁卢大学的一个净室设施中，该设施致力于制造MEMS和金基薄膜器件。它将使滑铁卢大学20多名教职员工和50多名研究生受益，他们目前正在使用这个无尘室设施。他们目前的一些与本提案相关的研究项目是：1)射频(RF)MEMS，2)芯片规模扫描探针显微镜，3)微制造和封装4)神经微电极的制造，5)MEMS/NEMS传感器6)集成微型天线阵列系统7)毫米波集成接收器系统，8)太赫兹生物传感器，9)MEMS光学扫描仪，10)用于基因微阵列读取和组织成像的微镜设备。

The purpose of this Research Tool and Instruments (RTI) grant proposal is to purchase a mask aligner system for lithography applications in the field of Micro-Electro-Mechanical Systems (MEMS), millimeter-wave, terahertz and optoelectronics. The mask aligner is a key processing tool in any micro-fabrication facility. It will be located in a clean room facility at the University of Waterloo that is dedicated to the fabrication of MEMS and gold-based thin film devices. It will benefit more than 20 faculty members and 50 graduate students at the University of Waterloo who currently use this clean room facility. Some of their current research projects that are relevant to the present proposal are: 1) radio frequency (RF) MEMS, 2) chip scale scanning probe microscopes, 3) micro-fabrication and packaging 4) fabrication of neural micro-electrodes,5) MEMS/NEMS sensors 6) integrated miniature antenna array systems 7) millimeter-wave integrated receiver systems, 8) terahertz biosensors, 9) MEMS optical scanners, 10) micro-mirror devices for genetic microarray reading and tissue imaging.