Electrical Characterization Facility

本申请的目的是建立一个国家的最先进的电气表征设施。 拟议的设施将能够在液氮温度（低于-200摄氏度）至超过200摄氏度的温度范围内测量薄膜，块状和纳米结构材料的主要电气特性（电阻率，载流子迁移率和载流子浓度）。 这个开放获取的设施将增强新兴通信技术研究所（ECTI）现有的制造和表征工具。ECTI是加拿大首个跨学科、跨院系的开放式研究机构，位于多伦多大学。 ECTI运营着两个最先进的洁净室，为用户提供薄膜沉积、反应离子蚀刻、光刻、光谱椭圆偏振和光学表征工具。

The aim of this application is to establish a state-of-the-art electrical characterization facility. The proposed facility will be capable of measuring the primary electrical properties of thin-film, bulk, and nanostructed materials (resistivity, carrier mobility, and carrier concentration) over temperatures ranging from liquid nitrogen temperatures (under -200 degree C) to over 200 degree C. This open-access facility will augment existing fabrication and characterization tools in the Emerging Communications Technology Institute (ECTI). The first of its kind in Canada, ECTI is an inter-disciplinary, inter-faculty open research institute based at the University of Toronto. ECTI operates two state-of-the-art cleanrooms which provides users with access to thin-film deposition, reactive-ion etching, photolithography, spectral ellipsometry, and optical characterization tools.