Development of a Calibration Test Bed for MEMS Sensors

这项提议符合申请者的长期目标，即在西蒙·弗雷泽大学(SFU)的机电系统工程项目中建立智能运动跟踪(IMT)研究设施。到目前为止，申请者参与了这一领域的八个研究项目，所要求的设备与两个申请者的探索补助金建议的研究直接相关。在过去的十年中，申请者致力于开发基于机电一体化的“智能传感器系统”，利用微电子机械系统(MEMS)传感器进行运动跟踪(导航)。用于这一目的的关键传感器是惯性测量单元(IMU)，它可以用来感知它们所连接的对象的运动。传统的MEMS IMU包括三轴加速度计--用于检测三个方向(x-y-z)的加速度--和三轴速率陀螺仪--用于检测三个方向(滚转-俯仰-偏航)的角速度。IMU中使用的加速度计和陀螺仪传感器容易受到各种误差的影响，这些误差是由固有的传感器设计不一致引起的，以及由于器件安装缺陷引起的交轴误差。最重要的是，由于其设计中的小结构，MEMS传感器天生就对温度变化敏感。因此，通过使IMU经历已知的温度循环并在整个热循环期间获取IMU输出数据，对IMU进行热校准是必要的任务。

This proposal is in line with the applicants' long-term objective to establish an Intelligent Motion Tracking (IMT) research facility at the Mechatronic Systems Engineering program at Simon Fraser University (SFU). Thus far, the applicants are engaged in eight research projects in this area, and the requested equipment is directly related to both applicants' Discovery Grant proposed research. Over the past decade the applicants have worked in various projects towards development of mechatronics based "Smart Sensor Systems" for motion tracking (navigation), utilizing Micro-Electro-Mechanical-Systems (MEMS) sensors. The key sensors used for this purpose are inertial measurement units (IMU) that can be used to sense the motion of an object they are attached to. Conventional MEMS IMUs include tri-axial accelerometer - to sense acceleration in three directions (x-y-z) - and tri-axial rate gyros - to detect angular rates in three directions (roll-pitch-yaw). The accelerometers and gyroscope sensors used in the IMU are susceptible to various errors caused by inherent sensor design inconsistencies and cross-axis errors caused by device-mounting imperfections. Most importantly, MEMS sensors are inherently susceptible to changes in temperature due to the small structures within their design. As a result, thermal calibration of the IMU is a necessary task by subjecting the IMU to known temperature cycles and acquiring the IMU output data throughout the duration of thermal cycling.