A new MEMS gyroscope design based on nonlinear coupling and internal resonance

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Micro-gyroscopes are the next major sensory application of the MEMS (Micro Electro Mechanical System) technology after the successful commercialization of pressure sensors and accelerometers. The market value of MEMS gyros is expected to be in excess of $1.57B in 2017. These sensors employ a vibrating mass to detect angular rate through coupling of vibration modes of a structure. However, MEMS gyros often suffer from limited resolution and long-term drift. This is partly due to the small signals produced by these devices and manufacturing non-idealities. This proposal utilizes nonlinear coupling and the phenomenon of internal resonance to improve the performance of vibratory MEMS gyroscopes. The nonlinear coupling between the modes will be a result of the device designs and can be enhanced with electrostatic forces. Theoretical and preliminary experimental work on macro- and micro-systems have been conducted. Our experiments at the macro-scales demonstrate that this nonlinear coupling can significantly enhance the gyro's sense mode performance by widening its resonance peak. This increases the gyro signal to noise ratio and positively influences the sensitivity. Our experiments on the microdevices reveal internal resonance at micro-scales. This proposal takes the results of the preliminary research to the next level through design and implementation of a novel category of micro-gyroscopes based on internal resonance phenomenon. The outcome of this research will be a major breakthrough in the development of inexpensive gyros for numerous applications. The proposed strategic project focuses on the optimized design, fabrication, and interfacing of the nonlinear gyroscopes, and employs the design methodology for the fabrication of new generation of gyros. The primary focus of the proposal falls best within NSERC Strategic target area of Manufacturing. Through working with an industrial partner with a successful commercialization track record, we define a research and technology roadmap for the commercialization of the devices. This project will train eight HQP's during its course.