Development of MEMS (Microelectromechanical Systems) actuation technology and micro actuator based MEMS devices

拟开展的研究重点是开发MEMS驱动技术和基于微致动器的MEMS器件，以解决行业存在的问题：(1)汽车平视显示器（Head-Up-Display， HUD）通过虚拟图像将驾驶信息显示在挡风玻璃或道路上，使驾驶员有更长的眼睛盯着道路的时间，提高驾驶安全性。目前的LCD HUD由于其高成本和性能的限制，还没有在普通汽车上广泛应用。本研究将开发高性能的MEMS驱动器，以构建具有比现有技术更优越性能的MEMS激光矢量扫描HUD，包括更高的亮度，更宽的视角，显着减小尺寸和成本。由于MEMS HUD的高性能和低成本，将大大扩展HUD在汽车、卡车和公共汽车上的应用，提高驾驶安全性；（ii）目前手机相机的VCM（音圈电机）自动对焦功耗高，精度低，响应速度慢，无法满足行业要求。随着手机相机分辨率的提高和尺寸的减小，握手成为影响图像质量的一个不可忽视的因素。手机相机行业一直在寻找OIS（光学图像稳定）技术来弥补握手。由于缺乏适合OIS的致动器，目前还没有OIS应用于商用手机相机。本研究将开发一种新型MEMS致动器，以实现手机相机的自动对焦和OIS，具有高响应速度、低功耗和高精度；(3)本研究将开发一种新型MEMS驱动器来构建MEMS FT-IR（傅立叶变换红外）光谱仪，该光谱仪比传统设计具有体积小，鲁棒性高，成本低的优点。MEMS F-IR光谱仪是一种高精度化学分析仪，适用于现场工业过程控制，环境和安全监测。在本研究中，它将用于下一代汽车酒精联锁。

The proposed research focuses on developing MEMS actuation technology and micro actuator based MEMS devices to solve industry problems: (i) Automotive HUD (Head-Up-Display) displays the driving information on the windshield or on the road through a virtual image, such that the driver can have longer eyes-on-road time to improve the driving safety. The current LCD HUD has not been widely used in general cars due to its high cost and performance limitations. This research will develop MEMS actuator of high performance to build MEMS laser vector scanning HUD with superior performance over existing technology including much higher brightness, much wider angle of view, significantly reduced size and cost. Due to its high performance and low cost, the MEMS HUD will significantly expand the application of HUD in cars, trucks and buses to improve the driving safety; (ii) Current VCM (Voice Coil Motor) autofocus for phone cameras cannot meet industry requirements due to its high power consumption, low accuracy and low response speed. With the increasing resolution and decreasing size of phone cameras, the handshake becomes a non-negligible factor affecting the image quality. The phone camera industry has been looking for OIS (Optical Image Stabilization) technology to compensate for the handshake. Currently no OIS has been implemented in commercial phone cameras due to the lack of actuator suitable for OIS. In this research, a novel MEMS actuator will be developed to realize both autofocus and OIS for phone cameras with high response speed, lower power and high accuracy; and (iii) This research will develop a novel MEMS actuator to build MEMS FT-IR (Fourier Transform Infrared) spectrometer which has the advantages of small size, high robustness and low cost over conventional designs. The MEMS F-IR spectrometer is a high precision chemical analyzer and suitable for onsite industry process control, environmental and security monitoring. In this research it will be used for the next generation automotive alcohol interlock.