Precision Micromachining of 3D Components with Micro/Nano-Scale Features

组件小型化正受到越来越多的关注，以实现更广泛的产品，以实现更高的性能，增加多功能，更多的定制，更好的适销性，节省重量，成本和空间等。组件小型化也允许新产品的出现，因为进一步的小型化产品可以为新的应用打开大门。用于制造微米和纳米级原型的典型光刻和MEMS工艺具有可能导致代价高昂的延迟的挑战，包括缓慢和昂贵的工艺(通常需要几个月)；而且，它们的使用仅限于少数材料，主要是硅基材料。目前的机械微加工工业实践严重依赖于传统的数控加工技术，导致高资本投资、高能量和高维护成本、非最佳的切割条件和低效率的工艺。此外，目前对微观尺度上的切割机理和机理的了解、有效制造复杂三维几何形状的工艺规划和夹具技术以及用于微加工的刀尖检测和切削液应用等过程控制技术的发展仍然非常有限。

Component miniaturization is gaining more attention for a broad spectrum of products to achieve improved performance, increased multi-functionality, more customization, better marketability, savings in weight, cost, and space, etc. Component miniaturization also allows new products to emerge because further miniaturized products can open doors for new applications. The typical photolithographic and MEMS processes for fabricating micro and nano-scale prototypes have challenges that can result in costly delays, including slow and expensive processes (often taking months); and, their use is limited to a few, mainly silicon-based, materials. Current mechanical micromachining industry practice relies heavily on conventional CNC machining technologies, resulting in high capital investment, high energy and maintenance cost, non-optimal cutting conditions and inefficient processes. Also currently, understanding of the cutting mechanics and mechanisms at the micro-scale, know-how on process planning and fixturing for effective fabrication of complex 3D geometries, and development of process control technologies such as tool tip detection and cutting fluid application for micro-machining are still very much limited.