"Precision Motion Systems Modeling, Analysis, and Control"

在许多产品的自动化制造中，例如用于医疗诊断的基于MEMS的血盒或用于电信的多芯片光学模块，需要在多个平移和旋转方向上相对于彼此精确放置零件。制造设备中运动系统的速度和精度决定了这些高附加值产品的制造过程的生产率和质量。目前，制造自动化中使用的大多数运动系统是通过将多个单自由度(DOF)平台堆叠在一起来实现多自由度运动的，这存在累积误差、降低刚度和增加成本的问题。日益提高的制造精度和生产率要求对运动系统技术提出了新的要求。

In automated manufacturing of many products, such as a MEMS-based blood cartridge for medical diagnosis or a multiple chip optical module used in telecommunication, parts need to be placed precisely relative to each other in multiple translation and rotation directions. The speed and precision of motion systems in manufacturing equipment determine the productivity and quality of the manufacturing process of these high value-added products. Currently, most motion systems used in manufacturing automation are constructed by stacking up many single degree-of-freedom (DOF) stages together to achieve multi-DOF motion, which suffer from accumulated errors, reduced stiffness and increased cost. The ever-increasing requirements of manufacturing precision and productivity demand a new motion system technology.