Structure-Property Relationships for Designing Multifunctional Microsystems and Nanosystems

在过去的10年里，我在麦吉尔大学的研究项目主要集中在：（i）深入了解微尺度薄膜材料的机械行为;（ii）通过开发多种微机电系统（MEMS）技术将这些知识转化为工业实践。因此，发现和创新对我的研究计划和活动同样重要。该计划对世界各地的工程师、科学家和教育工作者产生了直接影响。我的研究已被学术和工业研究小组用于设计微电子，MEMS和光机械系统，用于各种应用，从传感和信号处理到能量收集，便携式发电和扫描探针显微镜。目前全球研究的一个主要主题是使用纳米材料为未来一代MEMS增加有价值的功能，并创建全新的纳米机电系统（NEMS）和纳米机器。纳米材料可以彻底改变一系列对我们的社会，经济和生活质量至关重要的小型化技术。然而，为了将这种丰富的潜力转化为现实，必须应对许多艰巨的工程和科学挑战。这些挑战激励和设定我的研究计划的未来方向。我的长期愿景是详细了解纳米材料和结构的机械行为;然后应用这些知识来创造高影响力，高价值的小型化技术。作为实现这一目标的一步，我提出了一个为期5年的研究计划，其目标如下：（i）设计和实现一个独特的纳米膜平台，用于测量纳米力学性能（具体地，材料阻尼、残余应力和滞弹性弛豫）;及（ii）应用纳米膜平台设计高性能、多功能的纳米机械装置，以应用于经典和量子领域。因此，材料研究将与器件设计紧密结合。纳米膜平台有可能成为一个强大而有价值的工具，使大量革命性的纳米机械技术的设计和开发成为可能。它将保持和提高我们在微米和纳米长度尺度材料阻尼研究方面的世界领先地位，并使我们成为开发先进材料和结构的世界领导者，以实现开创性的量子纳米机械技术。该计划非常适合培训HQP，因为它提供了无数的机会，使创新，科学有趣和技术相关的贡献。在接下来的五年里，四名研究生（两名博士和两名硕士），十名本科生和一名研究助理将全职工作的拟议计划，设计，实施和应用纳米膜平台。我的目标是创造一个和谐的，多学科的培训环境，让学生享受自由探索他们的想法;学习有价值的实验，分析和计算技能;并获得智慧和诚信，利用他们的技能造福人类。在过去的六年里，我培训了三十七名HQP。我的学生为世界级的研究做出了贡献，最值得注意的是薄膜和微机械谐振器中的能量耗散和阻尼研究。在完成学业后，所有学生都进入了学术界和工业界，需要高度期望的技能。

For the past 10 years, my research program at McGill University has focused on: (i) obtaining a deep understanding of the mechanical behavior of microscale thin-film materials; and (ii) translating this knowledge to industrial practice by developing a multitude of microelectromechanical systems (MEMS) technologies. Thus, discovery and innovation are equally important to my research program and activities. This program has made a direct impact on a broad community of engineers, scientists, and educators around the world. My research has been used by academic and industrial research groups to design microelectronics, MEMS, and opto-mechanical systems for a diverse set of applications that range from sensing and signal processing to energy harvesting, portable power generation, and scanning probe microscopy. A major theme of current research worldwide is the use of nanomaterials to add valuable functionality to future generation of MEMS, and to create entirely new classes of nanoelectromechanical systems (NEMS) and nanomachines. Nanomaterials can revolutionize a large and diverse set of miniaturized technologies that are vital to our society, economy, and quality-of-life. However, many formidable engineering and scientific challenges must be tackled in order to translate this rich potential into practical reality. These challenges motivate and set the future directions of my research program. My long-term vision is to obtain a detailed understanding of the mechanical behavior of nanoscale materials and structures; and then apply this knowledge to create high-impact, high-value miniaturized technologies. As a step towards that goal, I propose a 5-year research program with the following objectives: (i) Design and implement a unique Nanomembrane Platform for measuring nanomechanical properties (specifically, material damping, residual stress, and anelastic relaxation) in ultrathin films and nanofabricated structures with thickness ranging from 1 to 100 nm; and (ii) Apply the Nanomembrane Platform to design high-performance, multifunctional nanomechanical devices for applications in the classical and quantum regimes. Thus, materials research will be closely integrated with device design. The Nanomembrane Platform has the potential to become a powerful and valuable tool to enable the design and development of a large array of revolutionary nanomechanical technologies. It will sustain and enhance our reputation for world-leading research in material damping at micrometer and nanometer length scales, and enable us to become a world leader in developing advanced materials and structures for groundbreaking quantum nanomechanical technologies. The proposed program is well suited for training HQP because it provides innumerable opportunities for making innovative, scientifically-interesting and technologically-relevant contributions. During the next five years, four graduate students (two PhD and two Masters), ten undergraduate students, and one Research Associate will work full-time on the proposed program to design, implement, and apply the Nanomembrane Platform. My goal is to create a harmonious, multidisciplinary training environment where students enjoy the freedom to explore their ideas; learn valuable experimental, analytical, and computational skills; and acquire the wisdom and integrity to use their skills for the benefit of humanity. During the past six years, I trained thirty seven HQP. My students have contributed to world-class research, most notably to studies of energy dissipation and damping in thin films and micromechanical resonators. After completing their studies, all students moved on to positions in academia and industry that require highly desired skills.