Micromachined Acoustic Particle Acceleration Sensors

我们正在提议与我们的工业合作伙伴，超电子海事系统公司（UEMS）和国防部（DND）进行合作研究项目。UEMS是拖曳阵列声纳系统的领先开发商，用于探测和定位水下目标。拖曳阵列由数百个传感器节点组成，通常有数百米长。每个传感器节点由四个声压传感器组成，将拖曳阵列的直径设置为约10cm。通过本项目，我们将采用微加工技术设计和制造与电流传感器具有相同灵敏度和动态范围的粒子加速度传感器，同时将阵列直径减小到2cm左右。这大大减少了阵列的重量和体积，并最终降低了整个系统的成本。UEMS在财务和技术上都处于有利地位，可以利用这项研究的结果，显著增强其现有产品线，并加深其在市场上的定位。这项工作的初步可行性研究是通过NSERC Engage项目进行的。通过本项目，我们将开发基于超灵敏微机械加速度计的声粒子加速度传感器，该传感器具有宽带宽和高动态范围。在整个项目过程中，将设计、制造、测试三个原型，并将其交付给UEMS。

We are proposing a collaborative research project with our industrial partner, Ultra Electronics Maritime Systems Inc. (UEMS) and the Department of National Defence (DND). UEMS is a leading developer of Towed Array sonar systems to detect and localize underwater targets. A Towed Array is made of hundreds of sensor nodes and typically is several hundred meters long. Each sensor node is made of four acoustic pressure sensors, setting the diameter of the Towed Array to about 10cm. Through this project, we will employ microfabrication techniques to design and fabricate particle acceleration sensors with the same level of sensitivity and dynamic range as the current sensors while reducing the diameter of the array to about 2cm. This results in significant reductions in the weight and volume of the array, and eventually, the overall system cost. UEMS is in a position financially and technically to capitalize on the results of this research to significantly enhance their current product line and deepen their niche in the market. The initial feasibility research on this work was conducted through an NSERC Engage project. Through this project, we will develop acoustic particle acceleration sensors based on ultrasensitive micromachined accelerometers with a wide bandwidth and high dynamic range. Three prototypes will be designed, fabricated, tested, and delivered to UEMS over the course of this project. Simon Fraser University is ideally suited to conduct this research due to existence of team expertise and two fully operational cleanrooms. All of the devised designs, prototypes, and future products based on them will be entirely fabricated and assembled in Canada. While this is logistically important to UEMS, it further provides job opportunities and wealth in Canada. Fourteen highly qualified personnel at various levels will be trained on different aspects of this technology. The training environment created through this proposal will be crucial for the future commercialization of the devices. This project falls under the priority research area of Undersea Systems for DND/NSERC Research Grants.