Precision Micromachining of 3D Components with Micro/Nano-Scale Features

元件小型化越来越受到广泛的关注，以实现更高的性能，增加多功能性，更多的定制，更好的适销性，节省重量，成本和空间等。元件小型化还允许新产品出现，因为进一步小型化的产品可以为新的应用打开大门。用于制造微米和纳米级原型的典型MEMS和MEMS工艺具有挑战性，可能导致昂贵的延迟，包括缓慢而昂贵的工艺（通常需要数月）;并且，它们的使用仅限于少数几种主要是硅基材料。目前的机械微加工工业实践严重依赖于传统的CNC加工技术，导致高资本投资、高能源和维护成本、非最佳切削条件和低效工艺。此外，目前，在微观尺度上的切削力学和机制的理解，工艺规划和夹具的专门知识，以有效地制造复杂的3D几何形状，以及过程控制技术的发展，如工具尖端检测和切削液应用的微加工仍然非常有限。

Component miniaturization is gaining more attention for a broad spectrum of products to achieve improved performance, increased multi-functionality, more customization, better marketability, savings in weight, cost, and space, etc. Component miniaturization also allows new products to emerge because further miniaturized products can open doors for new applications. The typical photolithographic and MEMS processes for fabricating micro and nano-scale prototypes have challenges that can result in costly delays, including slow and expensive processes (often taking months); and, their use is limited to a few, mainly silicon-based, materials. Current mechanical micromachining industry practice relies heavily on conventional CNC machining technologies, resulting in high capital investment, high energy and maintenance cost, non-optimal cutting conditions and inefficient processes. Also currently, understanding of the cutting mechanics and mechanisms at the micro-scale, know-how on process planning and fixturing for effective fabrication of complex 3D geometries, and development of process control technologies such as tool tip detection and cutting fluid application for micro-machining are still very much limited.