Smart nanostructured optical coatings prepared by pulsed plasma techniques

为了应对光学薄膜领域的科学技术挑战，申请人提出利用低压脉冲管理等离子体工艺（PMPP）对低温薄膜生长进行前沿研究，以制造结构控制的智能（主动）光学薄膜（SOC）具有定制的电致变色、热致变色、等离子体激元和其它适合于它们在智能混合光学滤波器（SHOF）中实现的性质。它旨在提高知识和培训HQP，同时侧重于以下方面： a）使用PMPP混合方法，我们计划探索同时结合等离子体增强化学气相沉积的空心阴极脉冲磁控溅射。主要的兴趣将致力于提供的新的可能性，由控制脉冲调制的放电参数以及气体动力学合成活性材料的均匀膜的形式与控制密度，纳米结构和孔隙率，和纳米复合材料含有明确定义的活性纳米粒子和/或纳米孔。 B）将纳米结构智能光学涂层集成在完整的多层SHOF中，目的是展示适合于安全（防伪）、气体和蒸汽传感器、用于能量控制和节省的智能窗户等领域的应用的设备功能。 该计划涵盖了从材料和光学涂层设计到工艺开发的所有步骤，以及先进应用的设备制造和测试;因此，它代表了基础研究和应用研究之间非常有吸引力的平衡，具有强大的技术影响潜力。

In response to the scientific and technological challenges in the area of optical coatings, the applicant proposes to perform cutting-edge research on the thin film growth at low temperatures using low pressure, pulse-managed plasma processes (PMPP) to fabricate structurally-controlled smart (active) optical coatings (SOCs) with tailored electrochromic, thermochromic, plasmonic and other properties suitable for their implementation in smart hybrid optical filters (SHOF). It aims at advancing knowledge and training HQP while focusing on the following: a) Using the PMPP hybrid approach, we plan to explore pulsed magnetron sputtering from a hollow cathode simultaneously combined with plasma enhanced chemical vapor deposition. Main interest will be devoted to the new possibilities offered by controlled pulse modulation of the discharge parameters as well as of the gas dynamics to synthesize active materials in the form of homogeneous films with controlled density, nanostructure and porosity, and nanocomposites containing well-defined active nanoparticles and/or nanopores. b) Integration of the nanostructured smart optical coatings within complete multilayer SHOFs will be performed with the aim to demonstrate device functions suitable for applications in the areas of security (anti-counterfeiting), gas and vapor sensors, smart windows for energy control and saving, and others. The program covers all steps leading from material and optical coating design to process development, as well as device fabrication and testing for advanced applications; as such, it represents a very attractive balance between fundamental and applied research, with a strong potential for technological impact.