High resolution non-contact surface-roughness industrial laser scanning microscope

先进的纳米制造技术使研究团队能够在生物材料和再生医学，新型生物粘合剂，燃料电池和传感器开发方面进行跨学科研究。纳米结构的稳健表征对研究计划至关重要。每个研究领域都需要高分辨率和高效率的大面积样品三维成像。目前，在滑铁卢大学（UW），研究小组依靠传统的表面表征方法，如扫描电子显微镜（SEM）或原子力显微镜（AFM），这些方法需要在小面积上进行缓慢的人工测量，而样品制备和接触模式测量会导致表面损伤。这导致了研究和培训的长时间延迟，需要额外的研究资金和人力，并限制了西澳大学有价值的工程项目的潜力和投资回报。我们提出了一种非接触式激光显微镜的获取与自动表面粗糙度分析。非接触式激光显微镜的优点包括快速的高分辨率图像采集，自动对焦的电动平台和用于大型非平面样品三维表征的瓦片成像。非接触式测量将消除表面损伤和工件的可能性。非接触式激光显微镜具有双共聚焦系统和多层模式，可以对细胞进行多层分析，这是研究纳米结构上细胞形态的必要条件。该系统将用于表征各种各样的材料，从生物材料的纳米结构原型、燃料电池的多孔膜、生物传感器和生物医学设备，这些材料可能在未来获得许可并商业化。因此，非接触式激光显微镜提供了研究项目所需的多功能和高通量表征，并且可以建立新的研究项目并吸引更广泛的研究合作伙伴。

Advanced nano-fabrication technologies enable the research team to pursue inter-disciplinary researches in biomaterials and regenerative medicine, novel bio-adhesive, fuel cell and sensor development. Robust characterization of the nano-structure are vital for the research program. High resolution and efficient 3D imaging of large area samples will be needed in each of the research areas. Currently, at the University of Waterloo (UW), the team rely on conventional surface characterization methods such as scanning electronic microscopy (SEM) or atomic force microscopy (AFM), which require slow, manual measurement on small area, while sample preparation and contacting mode measurement will induce surface damages. These cause long delay in research and training, requiring additional research funding and manpower, and limiting the potential and return-on-investment of valuable engineering programs at UW. We propose the acquisition of a non-contact laser microscope with automated surface roughness analysis. The superiorities of the non-contact laser microscope include fast high-resolution image acquisition, motorized stage with auto-focusing and tile imaging for 3D characterization of large non-planar specimens. Non-contact measurement will eliminate surface damage and possibilities of artifacts. With a dual confocal system and multilayer mode, the non-contact laser microscope enables the analysis of multiple layers, which is essential to examine cell morphology on nano-structure. The system will be used to characterize a wide range of materials from prototypes of nano-structures on biomaterials, porous membrane for fuel cells, biosensors and biomedical devices that may be licensed and commercialized in the future. Thus, the non-contact laser microscope provide a versatile and high-throughput characterization that is needed by the research programs, and it can enable building of new research program and engaging broader research partners.