Modeling and design of a power modulator for a KrF excimer laser

这项拟议的研究得到了LightMachinery的支持，这是一家位于安大略省尼皮安的加拿大私人公司。光机械是高功率，脉冲，气体放电TEA CO2和准分子激光器的制造商。研究了一种新型准分子激光系统的功率调制器的设计和激光气体等离子体的物理特性。****该项目的总体目标是优化功率调制器设计，以实现改进的镜头到镜头的重复性，更长的电极寿命，更高的端到端效率，并减少主触发电子开关（闸流管）的操作应力。潜在地，闸流管可以被半导体电源开关取代。LightMachinery提出了一种新的激光腔和功率调制器拓扑结构，一旦优化，就有可能实现一种高效、可扩展的设计，这种设计可以满足高能量工业市场的需求。****光机械成功地保持了20%的年增长率，主要是通过对准分子产品线的持续投资和技术进步。该项目代表了该投资的下一步，目标是继续以每年20%的速度增长公司。在实现这一增长目标的同时，加拿大经济的另一个好处是雇佣了高素质的人才。从历史上看，光机械每年雇佣1到2名熟练的技术和工程资源。

The proposed research is supported by LightMachinery, a private Canadian company, located in Nepean Ontario. LightMachinery is a manufacturer of high power, pulsed, gas discharge TEA CO2 and Excimer lasers. The research focus is on the design of a power modulator for a new excimer laser system and the physical properties of the laser gas plasma that forms the gain medium for the laser.****The overarching objective of this project is to optimize the power modulator design to achieve an improved shot to shot repeatability, longer electrode lifetime, higher end-to-end efficiency and reduced operating stresses on the main triggering electronic switch, a thyratron. Potentially, the thyratron can be replaced by a semiconductor power switch. A new laser cavity and power modulator topology proposed by LightMachinery offers the possibility, once optimized, of an efficient, scalable design which can be sized to address high energy industrial markets.****LightMachinery has succeeded in maintaining an annual growth rate of 20% largely through continued investment and technical advancement of the excimer product line. This project represents the next step in this investment with the goal to continue growing the company at 20% per year. An additional benefit to the Canadian economy, while meeting this growth target, has been the employment of highly qualified people. LightMachinery has historically hired 1 to 2 skilled technical and engineering resources per year.