Particle Acceleration Microsensors for Sonar Applications

我们正在与我们的工业合作伙伴，达特茅斯的超电子海事系统(UEMS)公司，提出一个合作研究项目，以开发用于声纳应用的微机械声粒子加速度传感器。声纳浮标探测水下物体产生或反射的声纳信号，广泛用于探测潜艇。作为声纳浮标的主要生产商，UEMS已经向北约国家销售了数百万个这样的敏感系统。目前UEMS使用的压电式水听器无法检测到低频声纳信号。SFU和UEMS团队合作制造了迄今为止报道的性能最高的微机械加速度计。在SFU和UEMS团队之前合作成功的基础上，该研究项目的目标是开发微机械粒子加速度传感器，以取代声纳浮标中的水听器。为了生产性能适合声纳浮标的设备，我们需要在缩小尺寸的同时显著提高早期设备的性能。因此，这项提案旨在产生新的器件设计、微制造工艺、接口电子、控制算法和封装技术，以达到所需的性能水平，这是通过简单应用现有方法无法达到的。在该项目过程中，将设计、制造、测试三个原型并交付给UEMS。通过这个项目开发的设备将突破性能的极限，并在该领域产生新的知识。SFU非常适合进行这项研究，因为存在团队专业知识和两个洁净室。根据工业合作伙伴的需要，所有设计的设计、原型和基于它们的未来产品都可以完全在加拿大制造和组装。这进一步为加拿大提供了就业机会和财富。七名高素质的人员将接受这项技术的不同方面的培训。通过这项提议创造的培训环境将对该设备未来的商业化至关重要。

We are proposing a collaborative research project with our industrial partner, Ultra Electronics Maritime Systems (UEMS) Inc., Dartmouth, NS, in order to develop micromachined acoustic particle acceleration sensors for sonar applications. Sonobuoys detect sonar signals that are produced or reflected by underwater objects and are extensively used for the detection of submarines. As a major producer of sonobuoys, UEMS has sold millions of these sensitive systems to NATO countries. The piezoelectric hydrophones currently used by UEMS cannot detect the low-frequency sonar signals. SFU and UEMS teams have collaborated to build the highest performance micromachined accelerometers reported to date. Building upon the success of previous collaborations between SFU and UEMS teams, the goal of this research project is to develop micromachined particle acceleration sensors that can replace hydrophones in sonobuoys. To produce devices with a performance suitable for sonobuoys, we need to significantly improve on the performance the earlier devices while reducing their dimensions. Consequently, this proposal aims to produce novel device designs, microfabrication processes, interface electronics, control algorithms, and packaging technologies to achieve the required performance levels, which are unattainable through simple application of existing methodologies. Three prototypes will be designed, fabricated, tested, and delivered to UEMS over the course of this project. The devices developed through this project will push the limits of performance and lead to generation of new knowledge in the field. SFU is ideally suited to conduct this research due to existence of team expertise and two cleanrooms. All of the devised designs, prototypes, and future products based on them can be entirely fabricated and assembled in Canada, as needed by the industrial partner. This further provides job opportunities and wealth in Canada. Seven highly qualified personnel will be trained on different aspects of this technology. The training environment created through this proposal will be crucial for the future commercialization of the devices.