An electronbeam evaporator for realtime and precise flux control for molecular beam epitaxy

这项提议是为了购买电子束(电子束)蒸发器，该蒸发器将用作位于不列颠哥伦比亚大学斯图尔特·布卢森量子物质研究所(SBQMI)的分子束外延(MBE)和角度分辨光电子能谱(ARPES)群的附加设备。集群工具是量子材料和器件铸造厂(QMDF)的核心基础设施，旨在解决工程量子材料系统中最具挑战性的问题。所提出的蒸发器对于沉积高熔点的4d和5d难熔金属是必要的，因为它们在电子结构中引入了强烈的自旋-轨道耦合。我们的目标是建立一个世界级的研究计划，有能力在过渡金属硫化物和氧化物以及其他新型二维材料系统中常规设计、诱导和控制新的性质和功能，如超导和拓扑保护态。这些目标构成了SBQMI目前活跃的许多核心研究指导方针的基础。含Ta、Ru、Ir和Mo等元素的材料分子束外延生长的主要障碍是这些金属在所需的高温(~2500°C)下固有的不稳定蒸发速率。蒸发器，以及我们在QMDF开发的原位电子衍射的创新应用，解决了这一关键问题，并提供了一种确保完美化学计量比的通用方法。随着稳定含难熔金属的新相的可能性，我们的目标是在量子材料的合成方面实现重大突破。过去，对新材料和器件的研究一直通过半导体行业等技术创新支撑着加拿大的快速经济增长，而新的量子材料是加拿大未来量子技术路线图的关键。QMDF的研究计划将是HQP培训的核心。QMDF侧重于对UBC和加拿大具有战略重要性的复合材料、纳米科学、分子束外延和先进光谱学，在HQP培训中发挥着关键作用。收购MBE+ARPES集群的电子束蒸发器将为总部提供一套独特的高度专业化的基础设施，为研究和工业提供关键技能培训。

This proposal is for the purchase of an electron-beam (e-beam) evaporator that will be used as an add-on to the molecular beam epitaxy (MBE) and angle-resolved photoemission spectroscopy (ARPES) cluster located in Stewart Blusson Quantum Matter Institute (SBQMI) at UBC. The cluster tool is the central infrastructure of the Quantum Materials and Devices Foundry (QMDF), designed to tackle the most challenging questions in engineered quantum material systems. The proposed evaporator is necessary for depositing high-melting temperature 4d and 5d refractory metals that are essential in topological materials, such as WTe2 and SrIrO3, because they introduce strong spin-orbit coupling into the electronic structure. We aim to build a world¬-class research program that has the ability to routinely design, induce, and control new properties and functionalities, such as superconductivity and topologically protected states, in transition¬ metal chalcogenides and oxides and other novel two¬-dimensional materials systems. These goals underlie many of the core research directives currently in vigor at SBQMI. The major obstacle to MBE growth of materials containing elements such as Ta, Ru, Ir and Mo is the metals' intrinsically unstable evaporation rates at the required high temperatures (~2500°C). The evaporator, and our innovative application of in situ electron diffraction developed at QMDF, solves this critical issue and provides a versatile approach to guarantee perfect stoichiometry. With the possibility of stabilizing new phases containing refractory metals, we aim to achieve major breakthroughs in the synthesis of quantum materials. Research on new materials and devices has been supporting the rapid economic growth of Canada with technological innovations for example in semiconductor industries in the past, and new quantum materials are key to Canada's roadmap for quantum technologies in the future. QMDF's research program will be central to HQP training. With its emphasis on complex materials, nanoscience, MBE, and advanced spectroscopy, of strategic importance to UBC and Canada, the QMDF plays a key role in HQP training. The acquisition of the e-beam evaporator for the MBE + ARPES cluster will offer HQP access to a unique suite of highly-specialized infrastructure, providing training in critical skills for both research and industry.