Electron-Beam Evaporator

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Superconducting circuits constitute one of today's most promising platforms to build quantum information processing systems and to study fundamental aspects of quantum physics. Considerable research efforts in both academia and industry therefore aim to further understand and improve the properties of these devices. The fabrication of superconducting circuit devices relies on large-scale technical infrastructure, which is only available in very few places in Germany. The Friedrich-Alexander University in Erlangen has now set out to become a leading center for quantum technology and for the development of superconducting quantum devices in particular. The fabrication of superconducting quantum devices uses superconducting thin-films desposited with high quality on a substrate material and patterns these films using micro- and nanoscale lithography and etching techniques. The quality of materials and the interfaces between them is thereby critical in order to preserve the quantum-mechanical coherence properties. The electron-beam evaporator which we hereby apply for will thus be one of the essential purchases of the newly established laboratory at the chair of experimental physics. It will enable the fabrication of superconducting thin-films and Josephson tunnel junctions and will therefore be an essential requirement for all of the planned research activities.