Research of Single-Event Burnout in 1.2-kV Rated CoolSiC Trench MOSFET

Research of Single-Event Burnout in 1.2-kV Rated CoolSiC Trench MOSFET
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1.2kV 额定值 CoolSiC 沟槽 MOSFET 的单粒子烧毁研究

DOI:
10.1109/tdmr.2022.3194706
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发表时间:
2022-12
影响因子:
2
通讯作者:
Hai-Fan Hu
Hai-Fan Hu
中科院分区:
工程技术3区
文献类型:
--
作者:
Cheng-Hao Yu;Meng-tian Bao;Ying Wang;Hao-Min Guo;Yun-Cheng Han;Hai-Fan Hu

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本文介绍了 1.2 kV 额定 CoolSiC 沟槽金属氧化物半导体场效应晶体管 (MOSFET) 中重离子引起的反向漏极电流衰减和单粒子烧毁 (SEB) 的二维 (2-D) 数值模拟结果。仿真和关键故障条件中采用的物理模型通过商用额定 1.2 kV SiC 平面栅极 MOSFET 器件的重离子辐照实验进行了验证。事实证明,与 SiC 平面栅极 MOSFET 相比,CoolSiC Trench MOSFET 的 SEB 性能相当。模拟了具有不同单缓冲层 (SBL) 设​​计的 CoolSiC Trench MOSFET 针对重离子的鲁棒性。此外,还研究了具有低载流子寿命控制的 SBL-CoolSiC Trench MOSFET。根据仿真结果,严重退化失效容限提高至800 V; SEB容错能力可达900V。
This paper presents the two-dimensional (2-D) numerical simulation results of heavy-ion induced reverse drain current degradation and single-event burnout (SEB) in the 1.2-kV rated CoolSiC Trench metal-oxide-semiconductor field-effect transistor (MOSFET). The physics models employed in simulations and critical failure conditions were validated by the heavy-ion irradiation experiments of the commercially available 1.2-kV rated SiC planar-gate MOSFET devices. The CoolSiC Trench MOSFET was proven to behave comparative SEB performance compared with the SiC planar-gate MOSFET. The robustness of the CoolSiC Trench MOSFET with different single buffer layer (SBL) designs against a heavy ion was simulated. Furthermore, the SBL-CoolSiC Trench MOSFET with low carrier lifetime control was investigated. According to the simulation results, the severe degeneration failure tolerance increased to 800 V; the SEB failure tolerance could reach 900 V.
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