Fabrication of Sb-doped p-type ZnO thin films by pulsed laser deposition

Fabrication of Sb-doped p-type ZnO thin films by pulsed laser deposition
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脉冲激光沉积法制备 Sb 掺杂 p 型 ZnO 薄膜

DOI:
10.1016/j.apsusc.2006.11.014
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发表时间:
2007-03
影响因子:
6.7
通讯作者:
Ye, Zhizhen
Ye, Zhizhen
中科院分区:
材料科学1区
文献类型:
--
作者:
Pan, Xinhua;Zeng, Yujia;Zhu, Liping;Li, Jiesheng;Che, Yong;Gu, Xiuquan;He, Haiping;Ye, Zhizhen

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采用脉冲激光沉积方法,通过单掺杂Sb受主,制备了p型ZnO薄膜。所获得的具有最佳电性能的薄膜显示出约1018 cm-3的空穴浓度和2-4Ωcm的电阻率。X射线衍射分析表明,薄膜具有良好的结晶性,具有(002)择优取向。通过X射线光电子能谱分析和ZnO中大尺寸失配V族掺杂模型的指导,认为Sb掺杂p型ZnO薄膜中最可能的受主是SbZn-2 VZn配合物。
p-Type ZnO thin films have been realized via monodoping antimony (Sb) acceptor by using pulsed laser deposition. The obtained films with the best electrical properties show a hole concentration in the order of 1018cm−3and resistivity in the range of 2–4Ωcm. X-ray diffraction measurements revealed that all the films possessed a good crystallinity with (002)-preferred orientation. Guided by X-ray photoemission spectroscopy analysis and a model for large-sized-mismatched group-V dopant in ZnO, an SbZn–2VZncomplex is believed to be the most possible acceptor in the Sb-doped p-type ZnO thin films.
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