Surface donor states-dependent bare surface barrier height and 2DEG density of AlGaN/GaN heterostructure exerted uniaxial stress

Surface donor states-dependent bare surface barrier height and 2DEG density of AlGaN/GaN heterostructure exerted uniaxial stress
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AlGaN/GaN 异质结构的表面施主态依赖的裸表面势垒高度和 2DEG 密度施加单轴应力

DOI:
10.1088/2053-1591/aaac98
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发表时间:
2018-02
影响因子:
2.3
通讯作者:
Wang Wen
Wang Wen
中科院分区:
材料科学4区
文献类型:
--
作者:
Wang Ashu;Zeng Lingyan;Wang Wen

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基于电荷中性原理和2DEG电子来自AlGaN表面施主态(SDS)的事实,提出了一种解析计算AlGaN/GaN异质结构在单轴应力作用下裸露表面势垒高度和2DEG密度(NS)的方法,并阐明了它们随SDS变化的机理.分析计算中考虑了均匀分布和高密度单能级两种情况,计算结果与三维机电模拟和实验数据吻合较好。单轴应力改变了AlGaN/GaN异质结构中的压电极化电荷,相应地,对于UD-SDS的情况,NS的变化依赖于UD-SDS的密度,而对于HDSL-SDS,NS是固定的(费米能级钉扎),NS的变化最大。
Based on the principle of charge neutrality and fact that 2DEG electrons come from the surface donor states (SDSs) of AlGaN, a method for analytical calculation of the bare surface barrier heightand 2DEG density (N S) of AlGaN/GaN heterostructure exerted uniaxial stress is presented, and mechanism of their changes dependent on SDSs is illustrated. Two general cases of the uniform distributed SDSs (UD-SDSs) and high-density-single-level SDSs (HDSL-SDSs) are considered in the analytical calculation and the results are consistent with the 3D electro-mechanical simulation and experimental data. The uniaxial stress changes the piezoelectric polarization charge in the AlGaN/GaN heterostructure, correspondingly, for the case of UD-SDSs,and N S have changes which are dependent on the density of UD-SDSs, while for HDSL-SDSs,is fixed (Fermi-level pinning) and N S has a maximum change.
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