Self-assembling of strain-induced Y2O3 nanostructures grown on LaAlO3 by photo-assisted MOCVD
Self-assembling of strain-induced Y2O3 nanostructures grown on LaAlO3 by photo-assisted MOCVD
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通过光辅助 MOCVD 在 LaAlO3 上生长应变诱导 Y2O3 纳米结构的自组装
DOI：
10.1016/j.apsusc.2012.10.115
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发表时间：
2013
影响因子：
6.7
通讯作者：
Penchu chou
中科院分区：
文献类型：
--
作者：
Wei Li;Shanwen Li;Guoxing Li;Baolin Zhang;Penchu chou
采用光辅助金属有机化学气相沉积（PhA-MOCVD）技术在邻近基质（100）取向LaAlO3（LAO）上制备了y2o3纳米点。在不同生长参数下，研究了沿台阶自组装的y2o3纳米点的成核和生长过程。研究发现，不同的衬底温度、氧分压和生长时间可以很好地调节y2o3纳米点的密度和尺寸。在较低温度下，y2o3纳米点的形貌表现为小而致密的固体锥体。随着t的升高，点逐渐变大变稀疏。这种现象可以用两个竞争动力学过程来说明，即吸附原子的表面扩散和钇的脱附。氧分压的变化对纳米点的形貌也有影响。为了进一步讨论生长动力学，得到了更清晰的准线性分布，并通过改变生长时间来修正粗化效应。
Y2O3nanodots were fabricated on vicinal substrate (100)-oriented LaAlO3(LAO) by photo-assisted metalorganic chemical vapor deposition (PhA-MOCVD). Nucleation and growth processes of Y2O3nanodots self-assembled as rows along the terraces of LAO were investigated with various growth parameters. It is found that density and size of Y2O3nanodots can be tuned and well controlled by varying substrate temperature (Ts), oxygen partial pressure and growth time. At lower Ts, the morphologies of Y2O3nanodots are characterized by small and dense solid cones. With elevating Ts, the dots gradually grow larger and sparser. This phenomenon could be illustrated by two competitive kinetic processes, i.e. surface diffusion of adatoms and yttrium desorption. Morphologies of these nanodots were also influenced by variation of oxygen partial pressure. To further discuss the growth kinetics, a more clearly quasi-linear distribution was obtained and the coarsening effect is modified by varying growth time.
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影响因子：
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影响因子：
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影响因子：
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