The impact of quantum confinement on the electrical characteristics of ultrathin-channel GeOI MOSFETs

The impact of quantum confinement on the electrical characteristics of ultrathin-channel GeOI MOSFETs
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量子限制对超薄沟道GeOI MOSFET电特性的影响

DOI:
10.1088/1674-4926/35/4/044004
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发表时间:
2014-04
影响因子:
5.1
通讯作者:
Y.R. Bai
Y.R. Bai
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
M.M. Fan;J.P. Xu;L. Liu;Y.R. Bai

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基于TCAD软件中的密度梯度模型,研究了量子限制对超薄沟道GeOInn-MOSFET电学特性的影响。研究了沟道厚度(Tch)和背栅偏置(VBG)对GeOI MOSFET电学特性的影响,并与传统的半经典模型进行了比较。结果表明,当Tch>8 nm时,在QC模型下,GeOI MOSFET的电子传导路径比在CL模型下更靠近前栅界面;当Tch>8 nm时,量子力学机制主要影响亚阈值斜率(或阈值电压)。由于量子尺寸效应,随着沟道厚度的减小,关态电流可以被抑制。
The impact of quantum confinement on the electrical characteristics of ultrathin-channel GeOI n-MOSFETs is investigated on the basis of the density-gradient model in TCAD software. The effects of the channel thickness (Tch) and back-gate bias (Vbg) on the electrical characteristics of GeOI MOSFETs are examined, and the simulated results are compared with those using the conventional semi-classical model. It is shown that when Tch > 8 nm, the electron conduction path of the GeOI MOSFET is closer to the front-gate interface under the QC model than under the CL model, and vice versa when Tch 8 nm (or < 8 nm), the quantum-mechanical mechanism mainly impacts the subthreshold slope (or the threshold voltage). Due to the quantum-size effect, the off-state current can be suppressed as the channel thickness decreases.
DOI: 10.1109/vtsa.2011.5872220
发表时间: 2011-04
期刊: Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications
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