The study of a high-isolation single-pole-double-throw RF MEMS switch

The study of a high-isolation single-pole-double-throw RF MEMS switch
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高隔离度单刀双掷射频MEMS开关的研究

DOI:
10.1142/s0217984918503621
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发表时间:
2018-10
影响因子:
1.9
通讯作者:
Xiao Shen
Xiao Shen
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Han Lei;Xiao Shen

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In this paper, design, fabrication and measurements of a novel single-pole-double-throw three-state RF MEMS switch based on silicon substrate are presented. The RF MEMS switch consists of two UV-shaped beam push–pull thermal actuators which have three sta
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