Breakdown voltage analysis for the new RESURF AlGaN/GaN HEMTs

Breakdown voltage analysis for the new RESURF AlGaN/GaN HEMTs
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新型 RESURF AlGaN/GaN HEMT 的击穿电压分析

DOI:
10.1007/s11432-011-4496-0
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发表时间:
2012-01
期刊:
Sci China Inf Sci
影响因子:
--
通讯作者:
段宝兴
段宝兴
中科院分区:
其他
文献类型:
--
作者:
段宝兴

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本文通过分析有源区耗尽,证明 AlGaN/GaN 高电子迁移率晶体管 (HEMT) 的耗尽过程与硅功率器件的耗尽过程不同。基于 AlGaN/GaN HEMT 中发生的特殊击穿原理,我们提出了一种新型减小表面场的 AlGaN/GaN HEMT,具有双低密度漏极 (LDD) 和漏极附近的带正电区域,以优化表面​​电场并提高击穿电压。在该结构中,两个不同剂量的负电荷区域被引入到极化AlGaN层中,形成双LDD,并通过耗尽二维电子气来降低栅极附近的高电场。在漏极附近的电极上添加带正电的区域,以降低漏极边缘的高电场峰值。通过应用ISE(集成系统工程)仿真软件,我们验证了AlGaN/GaN HEMT中存在虚拟栅极效应。击穿电压从传统结构中的257V提高到所提出结构中的550V。
This paper demonstrates that the depletion process for AlGaN/GaN high electron mobility transistors (HEMTs) is different than that for silicon power devices by analyzing active region depletion. Based on the special breakdown principle that occurs in AlGaN/GaN HEMTs, we propose a new reduced surface field AlGaN/GaN HEMT with a double low-density drain (LDD) and a positively charged region near the drain to optimize the surface electric field and increase the breakdown voltage. In this structure, two negative charge regions with different doses are introduced into the polarization AlGaN layer to form a double LDD and decrease the high electric field near the gate by depleting two-dimensional electron gas. A positively charged region is added to the electrode near the drain to decrease the high electric field peak at the drain edge. By applying ISE (integrated systems engineering) simulation software, we verify that the virtual gate effect occurs in the AlGaN/GaN HEMTs. The breakdown voltage is improved from 257 V in the conventional structure to 550 V in the proposed structure.
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