The function of an In0.17Al0.83N interlayer in n-ZnO/In0.17Al0.83N/p-GaN heterojunctions

The function of an In0.17Al0.83N interlayer in n-ZnO/In0.17Al0.83N/p-GaN heterojunctions
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n-ZnO/In0.17Al0.83N/p-GaN异质结中In0.17Al0.83N中间层的功能

DOI:
10.1016/j.apsusc.2016.09.165
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发表时间:
2017-01
影响因子:
6.7
通讯作者:
Chang Liu
Chang Liu
中科院分区:
材料科学1区
文献类型:
--
作者:
Xiao Wang;Xuewei Gan;Guozhen Zhang;Xi Su;Meijuan Zheng;Zhiwei Ai;Hao Wu;Chang Liu

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采用In0.17Al0.83N作为过渡层,在p型GaN衬底上沉积了氧化锌薄膜,形成了n-ZnO/In0.17Al0.83N/p-GaN双层异质结二极管。提高了氧化锌薄膜的结晶质量,使其沿垂直于(10 1‘1)晶面的-lt;70 7’4>取向生长。通过引入In0.17Al0.83N中间层,减小了反向漏电流。N-ZnO/In0.17Al0.83N/p-GaN异质结的电致发光光谱主要由正偏压下的p-GaN发射和反向偏压下的n-ZnO发射主导。测得氧化锌与In0.17Al0.83N之间的价带偏移和导带偏移分别为−0.72 eV和1.95 eV。
ZnO thin films were deposited on p-type GaN with a thin In 0.17 Al 0.83 N interlayer, forming double heterostructural diodes of n-ZnO/In 0.17 Al 0.83 N/p-GaN. The crystalline quality of the ZnO films was improved and its orientation was kept along< 70 7¯ 4> that was perpendicular to (10 1¯ 1) plane. The reverse leakage current was reduced by introducing the In 0.17 Al 0.83 N interlayer. The electroluminescence spectra of the n-ZnO/In 0.17 Al 0.83 N/p-GaN heterojunctions were dominated by p-GaN emissions under forward biases and n-ZnO emissions under reverse biases. The valence-band offset and conduction-band offset between the ZnO and In 0.17 Al 0.83 N were determined to be− 0.72 and 1.95 eV, respectively.
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