A continuous surface-potential solution from accumulation to inversion for intrinsic symmetric double-gate MOSFETs
A continuous surface-potential solution from accumulation to inversion for intrinsic symmetric double-gate MOSFETs
复制标题
本征对称双栅 MOSFET 从累积到反转的连续表面电势解决方案
DOI:
10.1080/08927020802609454
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发表时间:
2009-04
影响因子:
2.1
通讯作者:
Lining Zhang
中科院分区:
文献类型:
--
作者:
Jin He;Rui Zheng;Mansun Chan;Jian Zhang;Lining Zhang
A continuous surface-potential solution of Poisson's equation is derived for intrinsic (or lightly doped) symmetric double-gate (DG) Metal-Oxide-Semiconductor-Field-Effect-Transistors (MOSFETs). The resulting expression is smooth and continuous from accumulation through depletion to inversion regions. The dependences of the surface potential on various physical parameters including the quasi-Fermi potential, silicon film thickness, gate dielectric thickness and temperature are studied and compared with 2-D numerical simulation. Excellent agreements between them suggest that the proposed surface-potential solution is accurate over a wide range of physical parameters and can be used in surface-potential-based symmetric DG MOSFET modelling.
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