High-power density SiC MESFETs with multi-recess gate

High-power density SiC MESFETs with multi-recess gate
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具有多凹槽栅极的高功率密度 SiC MESFET

DOI:
10.1049/el.2011.0048
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发表时间:
2011-04
影响因子:
1.1
通讯作者:
Li, Z. J.
Li, Z. J.
中科院分区:
工程技术4区
文献类型:
--
作者:
Deng, X. C.;Li, L.;Zhang, B.;Mo, J. H.;Wang, Y.;Wang, Y.;Li, Z. J.

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采用标准的SiC MESFET结构,并在工艺中采用多凹槽栅,制备了SiC MESFET。多凹进栅极结构由于较高的击穿电压而有效地提高了输出功率密度。在漏极电压为65 V时,250μm栅周SiC MESFET的脉冲波饱和输出功率为2.24 W,线性增益为8 dB(2 GHz)。     实现了大于8.9 W/mm的射频功率输出,显示了这些器件在高功率操作方面的潜力。
Silicon carbide (SiC) MESFETs were fabricated by using a standard SiC MESFET structure with the application of the multi-recessed gate in the process. The multi-recessed gate structure is effective in increasing the output power density, due to higher breakdown voltage. A 250 µm gate periphery SiC MESFET biased at a drain voltage of 65 V demonstrated a pulsed wave saturated output power of 2.24 W with a linear gain of 8 dB at 2 GHz. RF power output greater than 8.9 W/mm was achieved, showing the potential of these devices for high-power operation.
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