A theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous layers
A theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous layers
复制标题
不连续层表面应力压阻微悬臂梁生物传感器的理论模型
DOI：
10.1016/j.snb.2009.02.046
复制
发表时间：
2009-05
影响因子：
8.4
通讯作者：
Zheyao Wang
中科院分区：
文献类型：
--
作者：
Youzheng Zhou;Qi Zhang;Litian Liu;Wenzhou Ruan;Chaonan Wang;Zheyao Wang
建立了用于表面应力敏感生物传感器的非连续层压阻微悬臂梁的理论模型。微悬臂梁由两个二氧化硅支撑层和两个夹在中间的硅压敏电阻条组成。为了解决压阻层的不连续性问题，微悬臂梁被分段，并使用经典的层合板理论为每一段开发了一个封闭形式的方程。通过对微悬臂梁各单元的积分，推导出了非连续微悬臂梁的二维理论模型，并利用有限元法（FEM）进行了仿真验证。该模型可以预测的挠度和灵敏度的压阻式微悬臂梁生物传感器与不连续层和表面应力。采用分段模型，得到了不连续压敏电阻尺寸对微悬臂梁性能的影响。基于该模型，为表面应力敏感微悬臂梁生物传感器的设计和优化提供了指导。
A theoretical model for laminated piezoresistive microcantilevers with discontinuous layers is developed for surface stress sensitive biosensors. The microcantilever consists of two supporting layers of silicon dioxide and two silicon piezoresistor strips sandwiched in-between. To address the issue of discontinuity of the piezoresistive layer, the microcantilever is segmented and a closed-form equation is developed for each segment using classical laminated plate theory. A two-dimensional theoretical model for the discontinuous microcantilever is deduced by integrating all the segments and is validated using finite-element-method (FEM) simulation. The model allows the predication of the deflection and the sensitivity of piezoresistive microcantilever biosensors with discontinuous layers and surface stress. The effects of the dimension of the discontinuous piezoresistors on the performance of the microcantilevers are obtained using the segment model. Based on the model, guidelines for design and optimization of surface stress sensitive microcantilever biosensors are given.
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