Investigation of breakdown mechanism during field emission process of AlN thin film microscopic cold cathode

Investigation of breakdown mechanism during field emission process of AlN thin film microscopic cold cathode
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AlN薄膜显微冷阴极场致发射击穿机理研究

DOI:
10.1116/1.4936383
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发表时间:
2016
影响因子:
1.4
通讯作者:
Hui Yang
Hui Yang
中科院分区:
工程技术4区
文献类型:
--
作者:
Feng Liang;Ping Chen;Degang Zhao;Desheng Jiang;Zongshun Liu;Jianjun Zhu;Jing Yang;Lingcong Le;Wei Liu;Xiaoguang He;Xiaojing Li;Xiang Li;Liqun Zhang;Jianping Liu;Hui Yang

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The breakdown mechanism of a 100 nm-thick AlN thin film cold cathode structure was investigated during the field emission process, where the AlN film was synthesized by metalorganic chemical vapor deposition under low pressure on an n-type SiC substrate.
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