Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.
Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.
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DOI：
10.1007/s10409-008-0222-6
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发表时间：
2009-02-01
影响因子：
3.5
通讯作者：
Ji, Hai-Feng
中科院分区：
文献类型：
--
作者：
Mutyala, Madhu Santosh Ku;Bandhanadham, Deepika;Pan, Liu;Pendyala, Vijaya Rohini;Ji, Hai-Feng
微机电系统（MEMS）领域的进步及其应用现在为超灵敏分析工具的设计提供了独特的机会。分析界继续寻找具有成本效益，可靠，甚至便携式的分析技术，可以为各种化学物质和生物分子提供可靠和快速的响应结果。微悬臂梁（mcl）已成为一种独特的无标签生物传感器或生物测定平台。几种电子设计，包括压阻式、压电式和电容式方法，已被应用于测量mcl暴露于化学物质时的弯曲或频率变化。本文综述了提高微悬臂梁（MCL）传感器灵敏度的机械、制造和电子方法。
Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free biosensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of microcantilever (MCL) sensors.
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DOI：
10.1088/0960-1317/16/12/004
发表时间：
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影响因子：
2.3
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