System and Control Analysis of Low Pressure Plasma Deposition

低压等离子体沉积系统及控制分析

• 批准号: 8909997
• 负责人: Michael Gevelber
• 金额: --
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-08-01 至 1992-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8909997&HistoricalAwards=false
• 关键词: System; Control; Analysis; Low; Pressure

A systems based approach will be used for improving low pressure plasma deposition (LPPD) processes. LPPD enables production of engineering materials of fine microstructure, high density, in useful engineering shapes. Important applications include production of metal matrix composites and alloy materials used in gas turbines and aircraft engines. Currently, these processes are operated in an empirically determined feedforward fashion. This poses limits on the achievable material quality and on the speed the process can be adapted to meet new manufacturing and materials requirements. This study will determine the important process characteristics needed to develop alternative controller design and will also aid in optimizing the operating regime and system design. Low order models (LOMs) that capture the dominant system dynamics will be developed to reveal the important system relationships. The process models will be analyzed to obtain an explicit description of the process constraints for LPPD.The LOMs will be developed from lumped and parametric representations of the process physics and by reduction of existing high order models. Analysis results will be confirmed by comparison to existing high order modelling and experimental studies.

基于系统的方法将用于改进低压等离子体沉积（LPPD）工艺。LPPD能够生产具有精细微观结构、高密度、有用的工程形状的工程材料。重要的应用包括生产用于燃气涡轮机和飞机发动机的金属基复合材料和合金材料。目前，这些过程以经验确定的前馈方式操作。这对可实现的材料质量和工艺适应新的制造和材料要求的速度造成了限制。这项研究将确定开发替代控制器设计所需的重要过程特性，并有助于优化操作制度和系统设计。低阶模型（LOMs），捕捉主导系统动态将被开发，以揭示重要的系统关系。将分析过程模型以获得LPPD的过程约束的显式描述。将从过程物理的集总和参数表示以及通过减少现有高阶模型来开发LOM。分析结果将通过与现有的高阶建模和实验研究进行比较来证实。