Real Time Control of Engineered Coating Microstructure by Chemical Vapor Desposition (CVD)

通过化学气相沉积 (CVD) 实时控制工程涂层微观结构

• 批准号: 9400328
• 负责人: Michael Gevelber
• 金额: --
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-08-01 至 1998-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9400328&HistoricalAwards=false
• 关键词: Real; Time; Control; Engineered; Coating

9400328 Gevelber The award is for research directed at improving the ability to fabricate engineered coatings through the development of a real- time control system for chemical vapor deposition. Such coatings are currently used to improve surface properties such as thermal shock resistance, corrosion, wear, and oxidation resistance. Real time measurement of the growth process is the basis for improved control of the coating morphology. The current practice of maintaining process input variables such as gas flow rates and temperatures at empirically determined setpoints does not ensure achievement of the desired morphology and requires extensive trial and error each time the equipment or the process is changed. The proposal research involves modeling the nucleation/growth kinetics, designing and implementing an appropriate control structure in-situ sensors, and experimental verification of the approach. The work is expected to result in expanded processing capabilities in chemical vapor deposition coating applications in the aerospace and machine tooling industries. The work is also likely to benefit a broader variety of advanced materials processing technologies by formulating a methodology for better closed loop control of such process.

9400328 Gevelber该奖项旨在通过开发化学气相沉积的真实的实时控制系统来提高制造工程涂层的能力。这种涂层目前用于改善表面性能，例如抗热震性、耐腐蚀性、耐磨性和抗氧化性。生长过程的真实的时间测量是改进涂层形态控制的基础。将工艺输入变量如气体流速和温度维持在经验确定的设定点的当前实践不能确保实现期望的形态，并且每次改变设备或工艺时都需要大量的试错。该提案的研究涉及建模的成核/生长动力学，设计和实施一个适当的控制结构原位传感器，和实验验证的方法。这项工作预计将导致在航空航天和机械加工行业的化学气相沉积涂层应用扩大处理能力。这项工作也可能有利于更广泛的各种先进的材料加工技术，制定了一种方法，更好地闭环控制这样的过程。