A High Precision, Six Degree-of-Freedom, Single-Sided, Noncontact, Optical Sensor Suitable for Assembly Automation

这项工作旨在开发和演示一种具有亚微米精度和分辨率的非接触式传感器。它将能够测量三个线性参数和三个旋转参数，使其具有六个自由度的能力，同时完全位于目标的一侧。这种装置将由几个横向效应光电二极管和几个光源组成，它们都将被整合到一个单独的封装中，形成一个独特的排列。目前还不存在这样的设备。如果成功，这种装置将是传感器技术的重大进步，应该是非常划算的。它将在对计量和检验产生重大影响的整个制造环境中具有潜在的应用。

This work is designed to develop and demonstrate a non- contacting sensor with sub-micron precision and resolution. It will be capable of measuring three linear and three rotational parameters, giving it six degrees of freedom capability, while being located entirely on one side of the target. This device will consist of several lateral effect photodiodes and several light sources which will all be incorporated into a unique arrangement in a single package. No such device exists today. This device, if successful, will be a significant advancement in sensor technology and should be very cost effective. It will have potential applications in a whole spectrum of manufacturing situations with a major impact on Metrology and Inspection.