Magnetically Levitated Micro-Robots

磁悬浮微型机器人

• 批准号: 8814982
• 负责人: Ilene Busch-Vishniac
• 金额: $ 59.6万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-08-01 至 1992-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8814982&HistoricalAwards=false
• 关键词: Magnetically; Levitated; Micro; Robots

This research will entail the design of magnetically levitated micro- robots which are capable of submicron-level six-degree-of-freedom motion over large ranges. Micro-robots are microelectromechanical devices capable of repeatable, precise automated, micron-level motions. They potentially have great application in such technologies as the construction of hybrid devices with associated semiconductor devices. The magnetic levitation approach was selected because magnetically-levitated systems can function in harsh environments and minimize friction effects and the associated problems of fine particle matter generation. Additionally, such systems can be designed to provide movement to absolutely defined locations so that motion errors do not compound. The research will entail four major paths of study: development of analytical tools which may be used for design of magnetic levitation microbiotic systems, development of a sensor system suitable for a levitation system at least four degrees of freedom, design of a macro/micro-robot pair system which permits high precision motion over a wide range, and demonstration of the system performing a variety of tasks.

这项研究将需要设计能够在大范围内进行亚微米级六自由度运动的磁悬浮微型机器人。微型机器人是一种微型机电设备，能够进行可重复的、精确的自动化的、微米级的运动。它们在诸如与相关半导体器件的混合器件的构造等技术中具有潜在的巨大应用。之所以选择磁悬浮方法，是因为磁悬浮系统可以在恶劣的环境中发挥作用，并最大限度地减少摩擦效应和细颗粒物质产生的相关问题。此外，这样的系统可以设计为提供运动到绝对定义的位置，这样运动误差就不会复合。该研究将包括四个主要的研究路径：开发可用于磁悬浮微生物系统设计的分析工具，开发适用于至少四个自由度的悬浮系统的传感器系统，设计允许在大范围内高精度运动的宏/微机器人对系统，以及演示该系统执行各种任务。