Modifications of Solid Lubricating Coatings by MeV Ion Beams

固体润滑二硫属化物的溅射涂层， MoS 2、TaS 2和WS 2因空间/高真空而受到关注 润滑应用。常规溅射的这些薄膜 化合物的寿命短，特别是对于滑动接触 应用.然而，粘附性的显著改善 这些化合物的表面可以通过轰击获得 重的高能离子对这些薄膜的破坏。的目的 建议的研究是研究粘合性的改善， 将这些膜附着到衬底上，例如蓝宝石，氮化硅， 氧化锆。和Mba工具钢， 通过ME离子束轰击这些膜。

Sputtered coatings of solid lubricating dichalcogenides such as MoS2 , TaS2, and WS2 have received attention for space/high vacuum lubrication applications. Conventionally sputtered films of these compounds have a short lifetime, particularly for sliding contact applications. However, a significant improvement in the adhesion of these compounds to surfaces can be obtained by the bombardment of these films by heavy, high energy ions. The objective of the proposed research is to study the improvement of adhesion of these films to substrate such as sapphire, silicon nitride, zirconium oxide. and Mba tool steel resulting from the bombardment of these films by ME ion beams.