Modifications of Solid Lubricating Coatings by MeV Ion Beams

固体二硫化物（MoS2、TaS2、WS2）溅射涂层在空间/高真空润滑领域的应用备受关注。通常，这些化合物的溅射膜具有较短的寿命，特别是用于滑动接触应用。然而，通过高能重离子轰击这些薄膜，可以显著改善这些化合物与表面的粘附性。本研究的目的是研究如何改善这些薄膜与蓝宝石、氮化硅、氧化锆等衬底的附着力。和由ME离子束轰击这些薄膜而产生的Mba工具钢。

Sputtered coatings of solid lubricating dichalcogenides such as MoS2 , TaS2, and WS2 have received attention for space/high vacuum lubrication applications. Conventionally sputtered films of these compounds have a short lifetime, particularly for sliding contact applications. However, a significant improvement in the adhesion of these compounds to surfaces can be obtained by the bombardment of these films by heavy, high energy ions. The objective of the proposed research is to study the improvement of adhesion of these films to substrate such as sapphire, silicon nitride, zirconium oxide. and Mba tool steel resulting from the bombardment of these films by ME ion beams.