Research Initiation: Plasma-Assisted Pulsed Laser Deposition of High Temperature Superconducting Thin Films; Novel Optical Plume Diagnostics
Research Initiation: Plasma-Assisted Pulsed Laser Deposition of High Temperature Superconducting Thin Films; Novel Optical Plume Diagnostics
批准号:
9210326
负责人:
Pritish Mukherjee
金额:
$10.0万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1992
资助国家:
美国
项目状态:
已结题
起止时间:
1992-09-01 至 1996-05-31
中文摘要
该项目将研究等离子体辅助激光沉积过程中的物理原理,以在衬底上原位生长高临界温度超导薄膜。对这一过程的物理机制的了解对于在低温衬底上沉积可重复的薄膜以及随后集成到现有的半导体技术中至关重要。沉积过程的成功建模和控制可能使超导薄膜的制造具有一致的性能,这是制造具有实际用途的器件所需的。
英文摘要
The project will investigate the physical principle underlying the plasma-assisted laser deposition process for the in situ growth of high critical temperature superconducting thin films on a substrate. An understanding of the physical mechanisms governing the process are critical for reproducible thin film deposition on a low temperature substrate and subsequent integration into existing semiconductor technologies. The successful modeling and control of the deposition process may allow the manufacture of superconducting thin films with the consistent properties that are needed to produce devices that are of practical usefulness.
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会议论文
Pulsed Thermal Excitation of Self-Assembled Nanotemplates for Manufacturing Dimensionally Controlled Nanostructured Films
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批准号:0217939
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项目类别:Standard Grant
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资助金额:$34.74万
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财政年份:2002
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负责人:Pritish Mukherjee
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依托单位:
In-situ Fabrication of Diamond Structures for Microelectromechanical Systems (MEMS) Using a Novel Pulsed Laser Process
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批准号:9978738
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项目类别:Continuing Grant
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资助金额:$33.5万
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财政年份:1999
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负责人:Pritish Mukherjee
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依托单位:
Pulsed Laser Ablation for Manufacturing: A Novel Dual-LaserFilm Growth Process
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批准号:9622114
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项目类别:Continuing Grant
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资助金额:$25.87万
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财政年份:1996
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负责人:Pritish Mukherjee
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依托单位:
海外基金