STRATMAN: Engineering Metrology

这项工作试图积极参与工程计量学术界，这是一个对制造业至关重要的领域。工程计量是可互换制造的支柱。在最近的过去，这一特点加上越来越需要制造更严格的公差，要求对影响这一领域的问题采取科学的方法。项目将包括开发用于光刻应用的超高精度二维阶段计量方法，螺纹工程计量的基础工作，以及开发原子尺度测量仪器的校准程序、方法和标准。这项工作对制造业的许多行业都至关重要。本研究要解决的问题包括机械工业和微电子工业。这项工作的成果将为这些行业提供领先的技术，并提高它们的竞争力。

This work attempts to actively engage the academic community in Engineering Metrology, an area vital to manufacturing. Engineering Metrology forms the backbone of interchangeable manufacturing. This characteristic combined with an increasing need to manufacture to tighter tolerances, in the recent past, dictates that a scientific approach to the issues that impact this area is needed. Projects that will be addressed include development of methodologies for ultra-high accuracy two dimensional stage metrology for lithography applications, basic work in engineering metrology for threads, and development of calibration procedures, methods and standards for atomic scale measurement instruments. This work is critical to a variety of industries in the manufacturing sector. The problems to be addressed in this research includes the mechanical and micro-electronic industries. The results of this work will provide leading edge technology to these industries and enhance their competitiveness.