A Near-Field Scanning, Phase-Contrast Microscope

近场扫描相差显微镜

• 批准号: 9988761
• 负责人: Robert Hocken
• 金额: $ 26.5万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-01 至 2005-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9988761&HistoricalAwards=false
• 关键词: Near; Field; Scanning; Phase; Contrast

This grant provides funding for the development of a near-field scanning optical microscope (NSOM) which utilizes a unique phase-contrast mechanism. The standard NSOM, available commercially, has allowed the range of visible light microscopy to be extended into the nanometer range of spatial resolution normally reserved for electron microscopes. However, unlike the electron microscope, an NSOM can image specimens in their natural environment (i.e., liquids and ambient pressures) and can obtain scanning force surface profiles simultaneous with intensity images. An NSOM takes advantage of the same contrast mechanisms available to conventional far-field methods (i.e., fluorescence, transmission, polarization, spectroscopy, reflectivity, and phase). The instrument proposed here would combine standard NSOM operation with pure phase imaging to provide a novel quantifiable NSOM phase-contrast measuring instrument useful for the metrology of a broad range of micro and meso scale devices.Measurement of objects at a molecular or near molecular scale is becoming increasingly important in many disciplines. These objects range from engineering surfaces, such as optical discs, magnetic disks, integrated circuits, and diamond turned optics to catalytic arrays of platinum, DNA molecules, cell biology, and nanoscale flaws in crystals. Far-field phase microscopy is currently a workhorse method of analysis in all of these areas. Success of this project will extend phase microscopy into the nanometer region. Particular systems to be studied in this work include biological cells, photoresist masks, and optical fibers. The semiconductor industry roadmap calls for 70-nm linewidths, which cannot be quantifiably measured with current optical methods. In addition, with the rapid growth of the optical fiber industry, determination of index of refraction profiles of optical fibers with 50-nm resolution will help manufacturers with fiber design and quality control processes. Combined with the need for higher spatial resolution analytical tools, success of this particular project will be of value to many disciplines.

该赠款为开发近场扫描光学显微镜（NSOM）提供了资金，该光学显微镜（NSOM）利用了独特的相对比机制。标准NSOM可在商业上获得，可将可见光显微镜的范围扩展到通常保留用于电子显微镜的空间分辨率的纳米范围。 但是，与电子显微镜不同，NSOM可以在其自然环境（即液体和环境压力）中成像标本，并且可以同时获得具有强度图像的扫描力表面曲线。 NSOM利用了常规远场方法可用的相同对比机制（即荧光，传输，极化，光谱，反射率和相）。 这里提出的仪器将将标准NSOM操作与纯相成像结合起来，以提供一种可用于广泛的微型和中层尺度设备的计量学有用的新型NSOM NSOM相位对比度测量仪器。分子或接近分子尺度的对象的计量量变得越来越重要。 这些物体范围从工程表面，例如光盘，磁盘，集成电路和钻石转换光学元件到铂，DNA分子，细胞生物学和纳米级缺陷的催化阵列。 远场相显微镜目前是所有这些领域的主力分析方法。该项目的成功将扩展到纳米区域。在这项工作中要研究的特定系统包括生物细胞，光蛋白抗掩模和光纤。 半导体行业的路线图需要70 nm的线宽，这不能用当前的光学方法量化。 此外，随着光纤行业的快速增长，以50 nm分辨率的光纤折射率指数确定将有助于制造商具有纤维设计和质量控制过程。 结合需要更高空间分析工具的需求，该特定项目的成功对许多学科都具有价值。