High Axial Resolution Grazing Incidence Interferometry

该基金将用于验证放牧入射干涉测量中理论预测的畸变，并用于开发消除当前放牧入射干涉测量技术中存在的成像畸变、可变灵敏度和低轴向空间分辨率的方法。误差的验证将涉及不同样品几何形状的预期效果的计算和变形的实验测量。测量将使用衍射耦合掠入射干涉仪进行，该干涉仪设计用于测量名义上的平面部件。将使用单点金刚石车削在零件上创建特定的几何形状。验证研究的结果将用于开发一种畸变校正掠入射干涉仪的设计。如果成功的话，这项研究的结果将导致使用掠入射干涉测量原理的工业计量仪器设计的改进。本研究的主要目标是设计出能够分辨小高度和小横向范围特征的掠入射干涉仪。这种干涉计量能力将允许高分辨率的过程计量，用于各种制造部件的质量控制。

This grant provides funds for the verification of theoretically predicted distortion in grazing incidence interferometric measurements and for the development of a method for elimination of imaging distortion, variable sensitivity and low axial spatial resolution present in current techniques of grazing incidence interferometry. Verification of the errors will involve both calculation of the expected effects of different sample geometries and experimental measurements of the distortion. Measurements will be carried out using a diffractively coupled grazing incidence interferometer designed to measure nominally flat parts. Specific geometries will be created on the parts using single-point diamond turning. The results of the verification studies will be used to develop a design for a distortion-corrected grazing incidence interferometer.If successful, the results of this research will lead to improvements in the design of industrial metrology instruments using the principles of grazing-incidence interferometry. The primary goal of this research is to allow the design of grazing-incidence interferometers with the ability to resolve features with both small height and small lateral extent. Such interferometric metrology capability would allow high-resolution in-process metrology for quality control of a wide variety of manufactured parts.