High Axial Resolution Grazing Incidence Interferometry

高轴向分辨率掠入射干涉测量

• 批准号: 0084965
• 负责人: Robert Hocken
• 金额: $ 22.5万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-15 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0084965&HistoricalAwards=false
• 关键词: Axial; Resolution; Grazing; Incidence; Interferometry

This grant provides funds for the verification of theoretically predicted distortion in grazing incidence interferometric measurements and for the development of a method for elimination of imaging distortion, variable sensitivity and low axial spatial resolution present in current techniques of grazing incidence interferometry. Verification of the errors will involve both calculation of the expected effects of different sample geometries and experimental measurements of the distortion. Measurements will be carried out using a diffractively coupled grazing incidence interferometer designed to measure nominally flat parts. Specific geometries will be created on the parts using single-point diamond turning. The results of the verification studies will be used to develop a design for a distortion-corrected grazing incidence interferometer.If successful, the results of this research will lead to improvements in the design of industrial metrology instruments using the principles of grazing-incidence interferometry. The primary goal of this research is to allow the design of grazing-incidence interferometers with the ability to resolve features with both small height and small lateral extent. Such interferometric metrology capability would allow high-resolution in-process metrology for quality control of a wide variety of manufactured parts.

这笔赠款提供资金用于验证掠入射干涉测量中的理论预测失真，并用于开发一种方法，以消除当前掠入射干涉测量技术中存在的成像失真，可变灵敏度和低轴向空间分辨率。 误差的验证将涉及不同样品几何形状的预期效应的计算和失真的实验测量。测量将使用衍射耦合掠入射干涉仪进行，该干涉仪设计用于测量名义上的平面部件。将使用单点金刚石车削在零件上创建特定的几何形状。验证研究的结果将用于开发畸变校正掠入射干涉仪的设计，如果成功，这项研究的结果将导致改进使用掠入射干涉测量原理的工业计量仪器的设计。本研究的主要目标是允许掠入射干涉仪的设计与解决功能的能力与小的高度和小的横向范围。这样的干涉测量能力将允许用于各种制造部件的质量控制的高分辨率过程中测量。