The Sub-Atomic Measuring Machine

亚原子测量机

• 批准号: 9821003
• 负责人: Robert Hocken
• 金额: $ 46.92万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-05-01 至 2005-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9821003&HistoricalAwards=false
• 关键词: Sub; Atomic; Measuring; Machine

A subatomic measuring machine with a lateral range of 25 x 25 mm and a vertical range of100 um is to be built. A previously developed stage will be used as a base. Building the world's most accurate measuring machine for atomic-scale features over IC-chip size sample is immediately to provide a novel instrument for the metrology of integrated circuits. Principles applicable to the design of wafer steppers and scanners for the production of integrated circuits in 0.1 um and smaller feature sizes are going to also be demonstrated. Thus, both metrology and manufacturing machine design techniques will be developed. Major tasks are to develop a metrology near-field scanning optical microscope (NSOM) or other scanned probe microscope that has the inherent accuracy of the system, to measure a sample grid plate (mask) that was manufactured by Hewlett Packard and calibrated at the Physikalische Technische Bundesanstalt (PTB) in Germany and to use self-calibration techniques to map all of the errors of the stage to a level at least a factor of IO better than current instruments. The project is likely to generate the methodology and instrumentation necessary to push positioning of macroscopic objects to subatomic accuracies over commercially significant ranges. These accuracies and ranges will be required by the next generation of micro-circuits.

将建造一台横向测量范围为25 x 25 mm，纵向测量范围为100 um的亚原子测量机。先前开发的阶段将用作基地。构建世界上最精确的测量机器，原子尺度特征超过ic芯片尺寸的样品是立即提供集成电路计量的一种新型仪器。适用于0.1 um及更小特征尺寸集成电路的晶圆步进器和扫描仪设计的原则也将被展示。因此，计量和制造机器设计技术都将得到发展。主要任务是开发具有系统固有精度的计量近场扫描光学显微镜（NSOM）或其他扫描探针显微镜，测量由惠普制造并在德国物理技术联邦分析中心（PTB）校准的样品栅格板（掩膜），并使用自校准技术将阶段的所有误差映射到至少比现有仪器好1倍的水平。该项目可能会产生必要的方法和仪器，将宏观物体的定位提高到亚原子精度，达到商业上重要的范围。下一代微电路将需要这些精度和范围。