NIRT: Nanometrology for Nanoscale Science and Engineering

NIRT：纳米科学与工程的纳米计量学

• 批准号: 0506898
• 负责人: Robert Hocken
• 金额: --
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0506898&HistoricalAwards=false
• 关键词: NIRT; Nanometrology; Nanoscale; Science; Engineering

Manufacturing of future nanodevices and systems will require accurate means to pattern, assemble, image and measure nanostructures. Current interferometry is inadequate for these tasks due to sensitivity to the environment, high cost, and the large masses of the high quality mirrors that are required on moving stages. The UNC Charlotte-MIT team will research new metrology technology based on large-area grating patterns called "Nanogrids" that have long-range spatial-phase coherence and ultra-high accuracy that is 10-100 times better than the best current gratings. Nanogrids will be used to replace interferometers in nanomanufacturing tools and calibrate other dimensional scales. Two unique tools, the MIT-developed Nanoruler, which is a grating patterning and reading tool, and the UNCC-MIT developed Sub-Atomic Measuring Machine (SAMM), which is a metrology and imaging tool, will be modified to meet these new accuracy targets. The SAMM will be used to characterize errors in the Nanogrids. Nanogrids will also be used by NIST and our industrial partners and the accuracy on nanoimprinted Nanogrids will be investigated.The results of this research will enable the commercialization of numerous new nanotechnology tools as well as educate a new generation of students in nano-precision engineering. The program will also supplement our public outreach which includes significant K-12 programming and participation.

未来纳米器件和系统的制造将需要精确的方法来图案化，组装，成像和测量纳米结构。 由于对环境的敏感性、高成本以及移动平台上所需的高质量反射镜的大质量，当前的干涉测量法不足以用于这些任务。 夏洛特-麻省理工学院团队将研究基于大面积光栅图案的新计量技术，称为“纳米光栅”，具有长距离空间相位相干性和超高精度，比目前最好的光栅高10-100倍。 纳米网格将被用来取代纳米制造工具中的干涉仪，并校准其他尺寸尺度。 两个独特的工具，麻省理工学院开发的纳米光栅，这是一个光栅图案化和阅读工具，和UNCC-MIT开发的亚原子测量机（SAMM），这是一个计量和成像工具，将被修改，以满足这些新的精度目标。 SAMM将用于表征纳米网格中的误差。 NIST和我们的工业合作伙伴也将使用纳米网格，并将研究纳米压印纳米网格的准确性。这项研究的结果将使许多新的纳米技术工具商业化，并教育新一代的学生在纳米精密工程。该计划还将补充我们的公共宣传，其中包括重要的K-12编程和参与。