NIRT: Nanometrology for Nanoscale Science and Engineering

NIRT：纳米科学与工程的纳米计量学

• 批准号: 0506898
• 负责人: Robert Hocken
• 金额: --
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0506898&HistoricalAwards=false
• 关键词: NIRT; Nanometrology; Nanoscale; Science; Engineering

Manufacturing of future nanodevices and systems will require accurate means to pattern, assemble, image and measure nanostructures. Current interferometry is inadequate for these tasks due to sensitivity to the environment, high cost, and the large masses of the high quality mirrors that are required on moving stages. The UNC Charlotte-MIT team will research new metrology technology based on large-area grating patterns called "Nanogrids" that have long-range spatial-phase coherence and ultra-high accuracy that is 10-100 times better than the best current gratings. Nanogrids will be used to replace interferometers in nanomanufacturing tools and calibrate other dimensional scales. Two unique tools, the MIT-developed Nanoruler, which is a grating patterning and reading tool, and the UNCC-MIT developed Sub-Atomic Measuring Machine (SAMM), which is a metrology and imaging tool, will be modified to meet these new accuracy targets. The SAMM will be used to characterize errors in the Nanogrids. Nanogrids will also be used by NIST and our industrial partners and the accuracy on nanoimprinted Nanogrids will be investigated.The results of this research will enable the commercialization of numerous new nanotechnology tools as well as educate a new generation of students in nano-precision engineering. The program will also supplement our public outreach which includes significant K-12 programming and participation.

未来的纳米版和系统的制造将需要准确的手段来对，组装，图像和测量纳米结构。 由于对环境的敏感性，高成本以及移动阶段所需的大量高质量镜子的敏感性，目前的干涉法对这些任务不足。 UNC Charlotte-MIT团队将基于称为“纳米粒子”的大区块光栅模式研究新的计量技术，它们具有长期的空间相一致性和超高准确性，比最佳当前光栅要好10-100倍。 纳米粒子将用于替代纳米制造工具中的干涉仪，并校准其他维度尺度。 MIT开发的两个独特的工具，它是一种光栅图案和阅读工具，以及UNCC-MIT开发的亚原子测量机（SAMM）（SAMM），这是一种计量和成像工具，以满足这些新的准确性目标。 SAMM将用于表征纳米醇中的错误。 NIST和我们的工业伙伴还将使用纳米粒细胞，并将研究纳米印刷的纳米粒细胞的准确性。这项研究的结果将使众多新的纳米技术工具的商业化以及教育纳米精确工程的新一代学生。该计划还将补充我们的公众推广，其中包括大量的K-12编程和参与。