WORKSHOP: Manufacturing of Three-Dimensional Components and Devices at the Meso and Micro Scales to be held in Gaithersburg, MD

研讨会：中观和微观尺度的三维组件和设备的制造将在马里兰州盖瑟斯堡举行

• 批准号: 9908580
• 负责人: Robert Hocken
• 金额: $ 2.84万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-06-01 至 2000-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9908580&HistoricalAwards=false
• 关键词: WORKSHOP; Manufacturing; Three; Dimensional; Components

In the last decade, considerable progress has been made in applying the technology of microelectronics fabrication to mechanical construction. This field has come to be referred to as MEMS (micro-electromechanical systems), and the devices produced by these technologies are usually nearly planar, having dimensions in the vertical direction of only a few micrometers. This drawback has led to limited success for these devices as sensors and almost no success for these devices as actuators and mechanisms. To many researchers and practitioners it appears plausible that three-dimensional meso and micro scale systems will have a much wider range of application than the so-called MEMS devices. Because of the expected growth in many manufacturing areas and what is perceived as a critical need to focus research attention and to develop insights into future directions and applications of three-dimensional micro and meso scale devices, a workshop will be conducted at and jointly with the National Institute of Science and Technology on May 18 and 19, 1999. The purpose of this workshop is to bring together leading industrial and academic researchers and practitioners of micro and meso scale manufacturing for the purpose of identifying processes, measurement methods, targets of opportunity, application areas, and other unforeseen points relevant to this emerging discipline.

在过去的十年中，将微电子制造技术应用于机械结构方面取得了长足的进步。 该领域已被称为MEMS（微电动机电系统），这些技术产生的设备通常几乎是平面的，在仅几微米的垂直方向上具有尺寸。 这种缺点导致这些设备作为传感器的成功有限，而这些设备作为执行器和机制几乎没有成功。对于许多研究人员和从业人员来说，三维中介系统和微型尺度系统的应用似乎比所谓的MEMS设备更广泛。 由于许多制造业领域的预期增长以及被认为是关注研究关注并将深入了解三维微型和中索尺度设备的洞察力和应用的关键需求，因此将在1999年5月18日和19日与国家科学技术研究所共同开展研讨会，并与该研讨会的目的汇集到搜索范围。识别过程，测量方法，机会目标，应用领域和其他与该新兴学科相关的不可预见的点的目标。