WORKSHOP: Manufacturing of Three-Dimensional Components and Devices at the Meso and Micro Scales to be held in Gaithersburg, MD

研讨会：中观和微观尺度的三维组件和设备的制造将在马里兰州盖瑟斯堡举行

• 批准号: 9908580
• 负责人: Robert Hocken
• 金额: $ 2.84万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-06-01 至 2000-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9908580&HistoricalAwards=false
• 关键词: WORKSHOP; Manufacturing; Three; Dimensional; Components

In the last decade, considerable progress has been made in applying the technology of microelectronics fabrication to mechanical construction. This field has come to be referred to as MEMS (micro-electromechanical systems), and the devices produced by these technologies are usually nearly planar, having dimensions in the vertical direction of only a few micrometers. This drawback has led to limited success for these devices as sensors and almost no success for these devices as actuators and mechanisms. To many researchers and practitioners it appears plausible that three-dimensional meso and micro scale systems will have a much wider range of application than the so-called MEMS devices. Because of the expected growth in many manufacturing areas and what is perceived as a critical need to focus research attention and to develop insights into future directions and applications of three-dimensional micro and meso scale devices, a workshop will be conducted at and jointly with the National Institute of Science and Technology on May 18 and 19, 1999. The purpose of this workshop is to bring together leading industrial and academic researchers and practitioners of micro and meso scale manufacturing for the purpose of identifying processes, measurement methods, targets of opportunity, application areas, and other unforeseen points relevant to this emerging discipline.

近十年来，微电子制造技术在机械结构中的应用取得了长足的进展。这个领域已经被称为MEMS（微机电系统），由这些技术生产的器件通常是接近平面的，在垂直方向上的尺寸只有几微米。这一缺点导致这些设备作为传感器的成功有限，而这些设备作为执行器和机构几乎没有成功。对于许多研究人员和实践者来说，三维中观和微尺度系统似乎比所谓的MEMS器件具有更广泛的应用范围。由于许多制造领域的预期增长，以及人们认为迫切需要集中研究注意力，并对三维微、中尺度设备的未来方向和应用进行深入研究，因此将于1999年5月18日和19日与国家科学技术研究所联合举办一次研讨会。本次研讨会的目的是将领先的工业和学术研究人员以及微中尺度制造的实践者聚集在一起，以确定与这一新兴学科相关的过程、测量方法、机会目标、应用领域和其他不可预见的点。