Two-Dimensional Long Wavelength Bolometer Arrays for Astronomy Applications

一种制作大面积长波长激光器的新方法 红外（LWIR）探测器阵列，可以在室内操作， 以及低温温度。 该技术使用 微机械加工和微电子的成熟技术 用于制造单片阵列的硅晶片的处理 LWIR探测器 形成阵列的检测器元件， 通过具有以下特性的辐射热测量计材料的超薄膜， 已知最高的电阻温度系数， 读出电子微电路制造在相同的硅上 芯片旁边的元素。 由此产生的探测器阵列将 具有成本低、重量轻、响应度高的特点， 高灵敏度。 低成本是由于单片阵列 不需要冷却的结构。 高响应度是由于 电阻率的温度系数大到大（更大 比传统测辐射热计的15%到0.2%）的新测辐射热计 材料 高灵敏度是由于以下因素的综合影响 高响应度、低噪声、高隔热性能 辐射热测量仪的辐射

An innovative method of fabricating large-area long wavelength infrared (LWIR) detector arrays that can be operated at room as well as cryogenic temperatures is proposed. This technique uses established technologies of micro-machining and microelectronic processing of silicon (Si) wafers for fabricating monolithic arrays of LWIR detectors. The detector elements of the array are formed by an ultra-thin film of a bolometer material possessing the highest temperature coefficient of resistance known, and the readout electronic microcircuit is fabricated on the same silicon chip next to the elements. The resultant detector arrays will possess features of low cost, low weight, high responsivity and high sensitivity. The low cost is due to a monolithic array structure requiring no cooling. The high responsivity is due a large to a large temperature coefficient of resistivity (greater than 15% to 0.2% for a conventional bolometer) of the new bolometer material. The high sensitivity is due to the combined effects of high responsivity, low noise and high thermal isolation of the bolometer from its surroundings.