RESEARCH INITIATION AWARD: VLSI and Micromechanical Fabrication Process Synthesis

[9309229] Mastrangelo本研究的目的是开发用于VLSI和微机械制造工艺自动合成的分析方法和计算机工具。这些工具将提出的器件的几何描述作为输入，将其分解为层，并使用系统程序生成制造序列和掩模集的描述。本研究开发：(a)二维和三维结构的拓扑分解和重建方法；(b)实现模拟器和半导体设备的算法和接口的计算机程序。分析方法采用多层次和多维逻辑，确定序列唯一性和极小性的基本问题。这些工具允许设计师在不了解中间制造步骤的情况下，使用比今天更复杂的制造序列，从概念到制造。＊＊＊

9309229 Mastrangelo The object of this research is the development of analytical methods and computer tools for the automatic synthesis of VLSI and micromechanical fabrication processes. These tools take a geometrical description of a proposed device as input, decompose it into layers, and generate a description of the fabrication sequence and mask set using a systematic procedure. This research develops: (a) topological decomposition and reconstruction methods for two- and three-dimensional structures and (b) a computer program that implements the algorithms and interfaces to simulators and semiconductor equipment. The analytical methods use multilevel and multidimensional logic and determine fundamental questions of sequence uniqueness and minimality. These tools allow designers to practice concept-to manufacturing without knowledge of intermediate fabrication steps yet using fabrication sequences much more complex that those existent today. ***