RESEARCH INITIATION AWARD: VLSI and Micromechanical Fabrication Process Synthesis

点击翻译按钮获取中文摘要

9309229 Mastrangelo The object of this research is the development of analytical methods and computer tools for the automatic synthesis of VLSI and micromechanical fabrication processes. These tools take a geometrical description of a proposed device as input, decompose it into layers, and generate a description of the fabrication sequence and mask set using a systematic procedure. This research develops: (a) topological decomposition and reconstruction methods for two- and three-dimensional structures and (b) a computer program that implements the algorithms and interfaces to simulators and semiconductor equipment. The analytical methods use multilevel and multidimensional logic and determine fundamental questions of sequence uniqueness and minimality. These tools allow designers to practice concept-to manufacturing without knowledge of intermediate fabrication steps yet using fabrication sequences much more complex that those existent today. ***