RESEARCH INITIATION AWARD: VLSI and Micromechanical Fabrication Process Synthesis

9309229 Mastrangelo本研究的目的是发展的分析方法和计算机工具的自动合成超大规模集成电路和微机械制造工艺。 这些工具将建议器件的几何描述作为输入，将其分解为层，并使用系统程序生成制造序列和掩模集的描述。 这项研究开发：（a）用于二维和三维结构的拓扑分解和重构方法，以及（B）实现所述算法和与模拟器和半导体设备的接口的计算机程序。 分析方法使用多层次和多维逻辑，并确定序列的唯一性和极小性的基本问题。 这些工具使设计师能够在不了解中间制造步骤的情况下实践概念到制造，但使用的制造顺序比今天存在的要复杂得多。 ***

9309229 Mastrangelo The object of this research is the development of analytical methods and computer tools for the automatic synthesis of VLSI and micromechanical fabrication processes. These tools take a geometrical description of a proposed device as input, decompose it into layers, and generate a description of the fabrication sequence and mask set using a systematic procedure. This research develops: (a) topological decomposition and reconstruction methods for two- and three-dimensional structures and (b) a computer program that implements the algorithms and interfaces to simulators and semiconductor equipment. The analytical methods use multilevel and multidimensional logic and determine fundamental questions of sequence uniqueness and minimality. These tools allow designers to practice concept-to manufacturing without knowledge of intermediate fabrication steps yet using fabrication sequences much more complex that those existent today. ***