RESEARCH INITIATION AWARD: VLSI and Micromechanical Fabrication Process Synthesis

9309229马斯特兰奇洛这项研究的目标是开发分析方法和计算机工具，用于超大规模集成电路和微机械制造工艺的自动综合。这些工具将建议的器件的几何描述作为输入，将其分解成层，并使用系统程序生成制造顺序和掩模组的描述。这项研究开发了：(A)二维和三维结构的拓扑分解和重建方法，以及(B)实现算法和与模拟器和半导体设备的接口的计算机程序。分析方法使用多层次和多维逻辑，并确定序列唯一性和最小性的基本问题。这些工具允许设计者在不知道中间制造步骤的情况下实践从概念到制造，但使用比目前存在的制造序列复杂得多的制造序列。***

9309229 Mastrangelo The object of this research is the development of analytical methods and computer tools for the automatic synthesis of VLSI and micromechanical fabrication processes. These tools take a geometrical description of a proposed device as input, decompose it into layers, and generate a description of the fabrication sequence and mask set using a systematic procedure. This research develops: (a) topological decomposition and reconstruction methods for two- and three-dimensional structures and (b) a computer program that implements the algorithms and interfaces to simulators and semiconductor equipment. The analytical methods use multilevel and multidimensional logic and determine fundamental questions of sequence uniqueness and minimality. These tools allow designers to practice concept-to manufacturing without knowledge of intermediate fabrication steps yet using fabrication sequences much more complex that those existent today. ***