Batch-Fabricated Nanochannel Devices for Direct Electrical Probing of Biomolecules

C. H. Mastrangelo和S. bhunia摘要本研究的目的是开发一种大规模生产低成本电极纳米通道器件的技术。该项目包括建模、制造、表征和测试这些设备。该方法是用边壁批量制造技术在光刻上定义纳米通道。每个装置包括一个纳米尺寸的通道，入口和出口开口，两个金属纳米电极嵌入在纳米通道壁上。知识优势：用于单分子探测和分析的纳米通道器件目前采用直接写入技术制造，这对于低成本制造是不可行的。在这个项目中，我们将开发在硅衬底上具有横向电极的低成本纳米通道器件的大规模生产方法。这些结构将被测试和表征在他们的物理性质和他们的能力询问大分子。在存在或不存在单个生物分子的情况下，将开发用于估计器件参数（如通道电导）的快速准确的半分析模型。更广泛的影响：使用纳米通道探针的单分子审讯技术在生物、环境和临床应用方面提供了巨大的机会。该项目将为两名研究生提供研究和培训机会；四名本科生和两名高中学生来自当地的一所女子学校，该校有一个独特的学生研究项目。重点将放在招募优秀的未被充分代表的学生上，包括少数族裔和女工程师。通过该项目开发的技术将与来自不同机构的同行研究小组共享，以对设备进行额外的测试和表征。

NSF Proposal 0824180PI: C. H. Mastrangelo and S. BhuniaAbstractThe objective of this research is the development of a technology for mass production of low-cost nanochannel devices with electrodes. The project includes modeling, fabrication, characterization and testing these devices. The approach is to define nanochannels lithographically with sidewall batch fabrication techniques. Each device consists of a nanometer-sized channel with inlet and outlet openings and two metallic nanoelectrodes embedded across the nanochannel walls. Intellectual Merits: Nanochannel devices for single molecule probing and analysis are presently fabricated with direct write techniques which are not viable for low cost fabrication. In this program we will develop methods for mass production of low-cost nanochannel devices with transverse electrodes on silicon substrates. These structures will be tested and characterized in terms of their physical properties and their ability to interrogate macromolecules. Fast and accurate semi-analytical models for estimation of device parameters such as channel conductance in the presence and absence of single biomolecule will be developed. Broader Impacts: Single molecule interrogation technology using nanochannel probes provides tremendous opportunities in biological, environmental and clinical applications. The project will provide research and training opportunity to two graduate students; up to four undergraduate students and up to two high school students from Hathaway Brown, a local all girls school with a distinctive student research program. Emphasis will be given on recruiting bright underrepresented students, including minorities and women engineers. The technology developed through this project will be shared with peer research groups from various institutions for additional testing and characterization of the devices.