MRI: Proposal for Purchase of Lithographic Mask Maker

MRI：购买光刻掩模制造商的提案

• 批准号: 9871253
• 负责人: Carlos Mastrangelo
• 金额: $ 48.67万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9871253&HistoricalAwards=false
• 关键词: MRI; Proposal; Purchase; Lithographic; Mask

9871253 Mastrangelo In this proposal the PIs request either an upgrade or a new replacement for their mask- maker machine at the Solid-State Laboratory. Their machine was donated by Ford Motor Company in January of 1993. Since it was installed in their lab, this machine has served many users both internal and external to the solid-state laboratory and has become an essential piece of equipment. Currently, this machine serves 37 users with an annual usage of 500 mask plates per year. Since 1993, approximately 2000 mask plates have been made in this machine in support of as many as 200 different student projects from more than 10 different faculty members. Photolithographic masks are essential for solid state device work. Typically, as many as 20 masks per student per year are needed. Externally, each one of these cost about $400-$600. With our in-house system each mask is made at a cost of $50. If approximately 250 masks are made per year by the UM faculty this results in roughly $90,000 of savings per year. The high cost of mask making is a definite limiting factor in the research done at the Solid-State Laboratory, and their system has served us well in reducing these costs. While still useful, the current mask making machine is a 1986 model, and it is difficult to repair. According to the manufacturer, the machine will no longer be supported in a few months. This decision will have a major impact in all the research projects that utilize the machine, and unless this situation is remedied, the overall laboratory output will drop substantially. Therefore, they must request for funds to replace their existing system. The new system will directly support more than 100 students in three different laboratories and centers (Solid-State, Sensors and Circuits, and Radiation) of the EECS Department. ***

9871253 Mastrangelo在这份提案中，PI要求升级或更换固态实验室的面具制造机。 他们的机器是1993年1月由福特汽车公司捐赠的。 自从安装在他们的实验室中以来，这台机器已经服务于固态实验室内外的许多用户，并已成为必不可少的设备。 目前，这台机器为37个用户提供服务，每年使用500个掩模板。 自1993年以来，大约有2000个掩模板已经在这台机器上支持多达200个不同的学生项目，来自10多个不同的教职员工。 光刻掩模对于固态器件工作是必不可少的。 通常，每个学生每年需要多达20个口罩。 在外部，每一个成本约为400 - 600美元。 使用我们的内部系统，每个面具的成本为50美元。 如果UM教师每年生产大约250个口罩，每年可节省大约90，000美元。 掩模制作的高成本是固态实验室所做研究的一个明确的限制因素，他们的系统在降低这些成本方面为我们提供了很好的服务。 虽然仍然有用，但目前的口罩制造机是1986年的型号，很难修理。 据制造商说，这台机器将在几个月内不再支持。 这一决定将对所有使用该机器的研究项目产生重大影响，除非这种情况得到纠正，否则实验室的总体产量将大幅下降。 因此，他们必须要求资金来取代现有的系统。 新系统将直接支持EECS部门三个不同实验室和中心（固态，传感器和电路以及辐射）的100多名学生。 ***