MRI: Proposal for Purchase of Lithographic Mask Maker

在此提案中，pi要求升级或更换固态实验室的掩膜制造机器。他们的机器是1993年1月由福特汽车公司捐赠的。自从它被安装在他们的实验室，这台机器已经服务于许多用户内部和外部的固态实验室，并已成为一个必不可少的设备。目前为37家用户提供服务，每年使用500张口罩。自1993年以来，在这台机器上已经制作了大约2000个掩模板，以支持来自10多个不同教师的多达200个不同的学生项目。光刻掩模对于固态器件工作是必不可少的。一般来说，每个学生每年需要多达20个口罩。从外部来看，每台设备的成本约为400- 600美元。使用我们的内部系统，每个口罩的成本为50美元。如果澳大教师每年生产约250个口罩，每年可节省约9万美元。在固态实验室进行的研究中，掩膜制造的高成本是一个明确的限制因素，他们的系统在降低这些成本方面为我们提供了很好的服务。虽然仍然有用，但目前的口罩制造机是1986年的型号，很难修复。根据制造商的说法，这台机器将在几个月内不再提供支持。这一决定将对所有使用这台机器的研究项目产生重大影响，除非这种情况得到补救，否则整个实验室的产出将大幅下降。因此，他们必须要求资金来取代他们现有的系统。新系统将直接支持EECS系三个不同实验室和中心（固态、传感器和电路以及辐射）的100多名学生。＊＊＊

9871253 Mastrangelo In this proposal the PIs request either an upgrade or a new replacement for their mask- maker machine at the Solid-State Laboratory. Their machine was donated by Ford Motor Company in January of 1993. Since it was installed in their lab, this machine has served many users both internal and external to the solid-state laboratory and has become an essential piece of equipment. Currently, this machine serves 37 users with an annual usage of 500 mask plates per year. Since 1993, approximately 2000 mask plates have been made in this machine in support of as many as 200 different student projects from more than 10 different faculty members. Photolithographic masks are essential for solid state device work. Typically, as many as 20 masks per student per year are needed. Externally, each one of these cost about $400-$600. With our in-house system each mask is made at a cost of $50. If approximately 250 masks are made per year by the UM faculty this results in roughly $90,000 of savings per year. The high cost of mask making is a definite limiting factor in the research done at the Solid-State Laboratory, and their system has served us well in reducing these costs. While still useful, the current mask making machine is a 1986 model, and it is difficult to repair. According to the manufacturer, the machine will no longer be supported in a few months. This decision will have a major impact in all the research projects that utilize the machine, and unless this situation is remedied, the overall laboratory output will drop substantially. Therefore, they must request for funds to replace their existing system. The new system will directly support more than 100 students in three different laboratories and centers (Solid-State, Sensors and Circuits, and Radiation) of the EECS Department. ***