High-Vacuum Molecular Micropumps for High Performance Gas Analysis Microsystems

用于高性能气体分析微系统的高真空分子微型泵

• 批准号: 1310013
• 负责人: Carlos Mastrangelo
• 金额: $ 36万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-06-15 至 2016-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1310013&HistoricalAwards=false
• 关键词: Vacuum; Molecular; Micropumps; Performance; Gas

The generation of high vacuum environments is essential in many chemical analysis analytical techniques such as mass spectrometry which constitutes the gold standard in many applications. In spite of great progress achieved in miniaturization techniques for sensor analysis systems over the past three decades, vacuum instruments have largely remain un-scaled due to the lack of miniaturized devices that can pump down to low vacuums. In this work we propose the design construction and testing of microfabricated molecular pumps that can attain micro-volume pressures of a few µTorr. We believe these devices will permit the realization of precision vacuum analytical micro-instruments for a wide range of applications.Intellectual Merit: The identification of chemical species is of vital importance in analytical instrumentation for liquid and gas based samples. In particular, the mass spectrometer is the gold standard instrument used for identifying species with exquisite resolution, but it intrinsically requires micro-Torr vacuums and bulky and expensive high vacuum pumps. Interest in the realization of low-cost portable handheld gas sensing microsystems has motivated research in gas micro-pumping technology for more than two decades, but it has not yet produced a micro-Torr capable micropump for micro-environments. The availability of high-vacuum micropumps is critical for the realization of miniaturized mass spectrometers for gas analyzers. Such analyzers enable high-sensitivity detection of chemical, biological agents and explosives in a micro-miniature integrated form never realized before. The principal goal of this work is the development of new pumping techniques and devices for the realization of high performance micro-Torr vacuum pumps suitable for analytical micro-instrumentation. Broader Impacts: The potential societal and economic impacts of this project are very important.Microfabricated high vacuum pumps are key components enabling the realization of miniature precision gas analysis equipment based on mass spectrometry. The successful implementation of this research can realize mass spectrometers of the size of a postage stamp. Such miniaturized mass spec has diverse applications in life sciences and national security. Presently the US government has a strong interest in detection and conclusive identification of harmful or dangerous gas phase compounds such as explosives, nerve gas, and other agents at very low concentrations in a pervasive manner. This project will specifically locally promote and develop a range of broader impact and outreach educational activities. In particular we will engage high-school student participation and awareness via the University of Utah nano camps, and we will promote the work to the local community including local high-diversity high schools (Salt Lake City East and West High). These camps are aimed to capture the interest of our excellent local high-school students from West and East high school campuses.

高真空环境的产生在许多化学分析分析技术中是必不可少的，例如质谱法，质谱法构成了许多应用中的黄金标准。尽管在过去的三十年里，传感器分析系统的小型化技术取得了很大的进步，但由于缺乏可以抽真空到低真空的小型化设备，真空仪器在很大程度上仍然没有按比例缩小。在这项工作中，我们提出了设计，建造和测试的微制造分子泵，可以达到微体积的压力为几微托。 我们相信这些设备将允许实现精密真空分析微型仪器的广泛应用。智力优点：化学物种的识别是至关重要的分析仪器的液体和气体为基础的样品。特别是，质谱仪是用于以精确的分辨率识别物种的黄金标准仪器，但它本质上需要微托真空和庞大而昂贵的高真空泵。对实现低成本便携式手持气体传感微系统的兴趣已经激励了对气体微泵送技术的研究超过二十年，但是它还没有产生用于微环境的具有微托能力的微泵。高真空微型泵的可用性对于实现用于气体分析仪的小型化质谱仪至关重要。这种分析仪能够以前所未有的微型集成形式对化学、生物制剂和爆炸物进行高灵敏度检测。 这项工作的主要目标是开发新的抽气技术和设备，实现高性能的微托真空泵，适用于分析微型仪器。更广泛的影响：该项目的潜在社会和经济影响非常重要。微型高真空泵是实现基于质谱的微型精密气体分析设备的关键部件。这项研究的成功实施可以实现邮票大小的质谱仪。这种小型化的质谱仪在生命科学和国家安全方面有着广泛的应用。目前，美国政府对以普遍的方式检测和确定性地鉴定有害或危险的气相化合物（例如爆炸物、神经毒气和其他非常低浓度的试剂）具有强烈的兴趣。该项目将具体在当地促进和发展一系列影响更广泛的外联教育活动。特别是，我们将通过犹他州纳米营地大学吸引高中生的参与和意识，我们将向当地社区推广这项工作，包括当地高度多样性的高中（湖城东部和西部高中）。这些夏令营旨在吸引来自西部和东部高中校园的优秀当地高中学生的兴趣。