Engineering Research Equipment Grant: Three-Dimensional Video Animation and Imaging for Crystal Growth and Thin Film Research

9310649 PRASAD该设备将主要用于正在进行的硅单晶连续直拉法晶体生长和用于超大规模集成电路/超大规模集成电路电路制造的薄膜形成的研究。此外，它们还有助于开展液封提拉法生长磷化铟单晶的研究和基础熔化/凝固研究。在工业拉晶机上的计算研究和全尺寸实验表明，除特殊情况外，CCZ生长过程的速度场和温度场本质上是三维的和振荡的。为了了解CCZ熔体流动和固体颗粒落入旋转熔池时熔化的物理现象，以及考察工艺参数对生长条件的影响，场变量的三维可视化和成像是必要的。拟议的视频摄影和图像处理设备在适当软件的帮助下，可以在现有的SUN工作站上执行这项任务。根据计算结果生成的生长过程的视频动画可用于控制参数影响的理论研究以及设计新的实验室和工业实验。这项研究范围的扩大将有助于加快CCZ技术的商业应用。如果能更好地了解晶体生长过程，就有可能以更快的速度生长出更完美的晶体，从而以更低的成本生产出更好的设备。

9310649 Prasad The equipment will primarily be used for ongoing research on continuous Czochralski (CCZ) crystal growth of silicon single crystals and thin film formation for VLSI/ULSI circuit fabrication. In addition, they may also help in conducting research on liquid encapsulated Czochralski growth of indium phosphide single crystals and in basic melting/solidification research. Computational research and full scale experiments in an industrial crystal puller have demonstrated that the velocity and temperature fields of CCZ growth process are inherently three dimensional and oscillatory except under special circumstances. To understand the physical phenomena underlying the CCZ melt flow and melting of solid pellets when dropped in a rotating pool of melt, and to examine the effect of process parameters on growth conditions, three dimensional visualization and imaging of field variables is necessary. The proposed video photography and image processing equipment, with the help of appropriate software, can perform this task on existing SUN workstations. The video animation of growth processes produced from the computational results, can be used for a theoretical study of the effect of governing parameters as well as for designing new laboratory and industrial experiments. The expanded scope of this research will help in faster development of this CCZ technique for commercial applications. If the crystal growth process can be understood better, it may be possible to grow more perfect crystals at faster rates, resulting in better devices at lower cost.