Laser Interferometry Measurement System for Mechanical Vibration Research

9311215威克特在这个项目中，开发了一个激光干涉测量系统，用于在振动、声学和动力学领域进行实验研究。具体项目包括轴向运动的材料和装置的动力学，如高速磁带和磁光磁带，以及电力传输椅和传动带。此外，还研究了微机械结构的动力学，以确定当机械结构大幅缩小时变得重要的振动问题，例如通过硅微机械加工技术。描述这类系统的动力学特性通常具有挑战性，因为基本振动频率可能非常高，振动幅度在亚微米范围内。该项目中使用的干涉仪的激光光斑大小在10到100pem之间，带宽至少为500千赫兹；对于位移测量，分辨率在0.008到20pem之间变化；对于速度测量，分辨率在0.5pem/秒到10pem/秒之间变化。该系统为从根本上了解微机械结构动力学提供了可靠的工具。

9311215 Wickert In this project a laser interferometry system is developed for conducting experimental research in the areas of vibration, acoustics and dynamics. Specific projects include the dynamics of axially moving materials and devices such as high speed magnetic and magneto-optical tapes, and power transmission chairs and belts. Also, the dynamics of micromechanical structures is investigated to identify the vibration issues that become significant when mechanical structures are significantly down- sized, for instance, through silicon micro-machining techniques. Characterizing the dynamics of such systems is generally challenging since the fundamental vibration frequencies can be extremely high, with the vibration amplitudes being in the sub- micron range. The interferometer used in the project has a laser spot size between 10 and 100 pem, a bandwidth of a least 500 khz; and a resolution that is variable between 0.008 pem and 20 pem for displacement measurements, and between 0.5 pem/sec and 10 pem/sec for velocity measurements. The system provides a reliable vehicle for obtaining fundamental understanding of micro- mechanical structural dynamics.