Laser Interferometry Measurement System for Mechanical Vibration Research

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9311215 Wickert In this project a laser interferometry system is developed for conducting experimental research in the areas of vibration, acoustics and dynamics. Specific projects include the dynamics of axially moving materials and devices such as high speed magnetic and magneto-optical tapes, and power transmission chairs and belts. Also, the dynamics of micromechanical structures is investigated to identify the vibration issues that become significant when mechanical structures are significantly down- sized, for instance, through silicon micro-machining techniques. Characterizing the dynamics of such systems is generally challenging since the fundamental vibration frequencies can be extremely high, with the vibration amplitudes being in the sub- micron range. The interferometer used in the project has a laser spot size between 10 and 100 pem, a bandwidth of a least 500 khz; and a resolution that is variable between 0.008 pem and 20 pem for displacement measurements, and between 0.5 pem/sec and 10 pem/sec for velocity measurements. The system provides a reliable vehicle for obtaining fundamental understanding of micro- mechanical structural dynamics.