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Contact Free Measurement of Three-Dimensional Curved Surface Using Laser Holographic Interferometry

利用激光全息干涉技术进行三维曲面的无接触测量

基本信息

批准号：
02650114
负责人：
FUJIO Hiroshige
金额：
$ 0.38万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650114/
关键词：
Laser Horography Interferometry Fringe Scanning Method Hologram Phase Gear Gear Accuracy Plane of Action 歯面誤差

项目摘要

(1) A simulation model to form the image of the objective surface on CRT proposed. Some kinds of test pieces were employed to the investigation : comparing their simulated images with observed figures on CRT, the both images coincide well each other. Consequently it is considered that the simplified model in the optical system for the simulation is practically usable. It enables to transform the coordinates of the objective surface to those on CRT.(2) Based on the transformability of the coordinates above-mentioned, holographic interferometry with a large angle of incidence is incorporated to the measurement of form deviation of tooth flank of spur gears. The form deviation was expressed by the error surface defined on the plane of action, and was compared with the result obtained by the conventional measurement using contacting stylus. It is confirmed that the form deviation obtained by laser holographic interferometry has a comparable measuring, accuracy to that of the conventional measuring method.(3)This method is applied to measurement of form deviation of helical gear. But there is a problem, that the existence of helix angle reduces the measurable region on a tooth flank in one shot and the area of this region decreases with increasing the helix angle and face width. To solve this problem, following procedure is proposed : The objective tooth flank is divided into some parts and the error surface for each divided zone of tooth flank is continuously concatenated on the plane of action of this gear. The error surface for the whole tooth flank is compared with the result of the conventional method. The measured results shows almost same accuracy as that of conventional method. A good characteristics of interferometry measurement are found, that a little chance of the error surface such as undulation in the form deviation of the objective tooth flank is clearly recongnized.

(1)提出了一种在CRT上形成物面像的仿真模型。用几种不同的试件进行了实验研究，将它们的模拟图像与CRT上的观测图像进行了比较，两者吻合较好。因此，认为用于仿真的光学系统简化模型是实用的。它能够将物镜表面的坐标转换为CRT上的坐标。(2)基于上述坐标系的可变换性，本文将大入射角全息干涉法应用于直齿圆柱齿轮齿面形差的测量。用作用面上的误差曲面来表示形状偏差，并与传统的触针法测量结果进行了比较。证实了用激光全息干涉法测量形状偏差具有与常规测量方法相当的测量精度。（3）将该方法应用于斜齿轮的形差测量。但存在一个问题，即螺旋角的存在减少了一次测量中齿面上的可测量区域，并且该区域的面积随着螺旋角和齿面宽度的增加而减小。为解决这一问题，提出了如下步骤：将目标齿面划分为若干部分，并将齿面每个划分区域的误差曲面连续地连接在该齿轮的作用平面上。并将整个齿面的误差曲面与传统方法的结果进行了比较。测量结果表明，几乎相同的精度与传统的方法。发现干涉法测量的一个良好特点是对被测齿面形位误差中的起伏等误差面的识别率很低。